Patents by Inventor Thomas S. Nemecek

Thomas S. Nemecek has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for making a low electrical resistivity, high purity aluminum nitride electrostatic chuck
    Patent number: 6017485
    Abstract: A controlled dielectric loss, sintered aluminum nitride body having a density of greater than about 95% theoretical, a thermal conductivity of greater than about 100 W/m-K, and a dissipation factor measured at room temperature at about 1 KHz selected from:(a) less than or equal to about 0.001; and(b) greater than or equal to about 0.01.A process for producing a controlled dielectric loss, sintered aluminum nitride body, comprising heat treating an aluminum nitride body at sintering temperatures, including providing a heat treatment atmosphere which effects a selected nitrogen vacancy population in the aluminum nitride body at the sintering temperatures, and cooling the aluminum nitride body from sintering temperatures at a controlled rate and in a cooling atmosphere effective to control the selected nitrogen vacancy population.
    Type: Grant
    Filed: March 28, 1996
    Date of Patent: January 25, 2000
    Assignee: Carborundum Corporation
    Inventors: Rudolph C. Enck, Jonathan H. Harris, Robert A. Youngman, Thomas S. Nemecek