Patents by Inventor Thomas S. Smigelski

Thomas S. Smigelski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Suppression of parasitic sidewall transistors in locos structures
    Patent number: 4373965
    Abstract: An improved process for eliminating parasitic sidewall transistor action associated with LOCOS isolation oxide structures. A combined oxide-nitride-oxide mask provides a large implant window and an underlying smaller oxidation window which is recessed about 11/2 microns relative to the implant window. Implantation, followed by oxidation provides a recessed isolation oxide and a buried inversion-suppressing impurity layer which spans the length of the oxide, including the "bird's beak" region.
    Type: Grant
    Filed: December 22, 1980
    Date of Patent: February 15, 1983
    Assignee: NCR Corporation
    Inventor: Thomas S. Smigelski