Patents by Inventor Thomas Sandwick

Thomas Sandwick has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of planarizing semiconductor wafers
    Patent number: 5935869
    Abstract: A CMP semiconductor wafer planarization method is provided employing an aqueous solution of a trialkanol amine as a wafer cleaning solution. Wafers are produced exhibiting a substantial reduction in semiconductor device failures as shown by a significant decrease in m.sub.1- m.sub.1 (metal to metal) shorts.
    Type: Grant
    Filed: July 10, 1997
    Date of Patent: August 10, 1999
    Assignee: International Business Machines Corporation
    Inventors: Cuc Huynh, Rangarajan Jagannathan, Amarnath Jha, Thomas Martin, Keith Pope, Thomas Sandwick