Patents by Inventor Thomas Schaetz

Thomas Schaetz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for fabricating a mask configuration
    Patent number: 6890689
    Abstract: During the fabrication of a mask, to substantially avoid systematic deviations from a desired configuration of recesses that will be formed in the mask, the patterning of the mask substrate is carried out in a sequence of subprocesses. The subprocesses are matched to one another such that the deviations that are formed from these subprocesses compensate for one another, so that in this way, error correction is achieved.
    Type: Grant
    Filed: August 26, 2002
    Date of Patent: May 10, 2005
    Assignee: Infineon Technologies AG
    Inventor: Thomas Schaetz
  • Method for fabricating a mask configuration
    Publication number: 20030039900
    Abstract: During the fabrication of a mask, to substantially avoid systematic deviations from a desired configuration of recesses that will be formed in the mask, the patterning of the mask substrate is carried out in a sequence of subprocesses. The subprocesses are matched to one another such that the deviations that are formed from these subprocesses compensate for one another, so that in this way, error correction is achieved.
    Type: Application
    Filed: August 26, 2002
    Publication date: February 27, 2003
    Inventor: Thomas Schaetz