Abstract: A sensor for determining at least one process variable of a medium, comprising: a metallic substrate which has a recess at least in a first area; a first dielectric layer which is arranged on the metallic substrate at least in the first area, wherein the first dielectric layer forms a membrane; at least one heating structure which is arranged on the first dielectric layer formed as a membrane in the first area, wherein the heating structure heats the medium; at least one temperature sensor element assigned to the first area, which temperature sensor element is arranged so as to be spaced apart from the heating structure on the first dielectric layer and detects the temperature of the medium heated on the heating structure; and at least one protective layer which covers at least the at least one heating structure and the at least one temperature sensor element.

Abstract: A thermal flow sensor for determining flow of a medium, comprising: a substrate; first and second temperature sensors arranged on the substrate, wherein the first and second temperature sensors are embodied as heatable temperature sensors or as a first non-heatable temperature sensor, which is associated with a first heating element, and as a second non-heatable temperature sensor, which is associated with a second heating element; a power supply unit, which by means of a first signal supplies the first heatable temperature sensor or the first heating element with a first heating power determined earlier during an adjustment operation and by means of a second signal supplies the second heatable temperature sensor or the second heating element with a second heating power determined earlier in the adjustment operation; and an evaluation unit, which in a measurement operation for determining flow of the medium ascertains a temperature difference between the first temperature sensor and the second temperature sen

Abstract: A thin-film sensor for a thermal flowmeter with at least a first substrate layer made of electrically non-conductive material, a second layer made of electrically conductive material and a cover layer to protect the resistance layer against abrasion, wherein the second layer is designed as two sensor elements, wherein at least a first of the two sensor elements is designed to introduce a heat quantity into a medium, and at least a second of the two sensor elements is designed to determine the ambient temperature, and the thin-film sensor has a gap that isolates the two sensor elements from one another.

Abstract: Thermal flow sensor (1) for determining flow of a medium (2), comprising: a substrate (3); first and second temperature sensors (4a, 4b) arranged on the substrate (3), wherein the first and second temperature sensors (4a, 4b) are embodied as heatable temperature sensors (5a, 5b) or as a first non-heatable temperature sensor (6a, 6b), which is associated with a first heating element (7a), and as a second non-heatable temperature sensor (6b), which is associated with a second heating element (7b); a power supply unit (8), which by means of a first signal (9a) supplies the first heatable temperature sensor (5a) or the first heating element (7a) with a first heating power determined earlier during an adjustment operation and by means of a second signal (9b) supplies the second heatable temperature sensor (5b) or the second heating element (7b) with a second heating power determined earlier in the adjustment operation; an evaluation unit (10), which in a measurement operation for determining flow of the medium

Abstract: A sensor for determining at least one process variable of a medium, comprising: a metallic substrate which has a recess at least in a first area; a first dielectric layer which is arranged on the metallic substrate at least in the first area, wherein the first dielectric layer forms a membrane; at least one heating structure which is arranged on the first dielectric layer formed as a membrane in the first area, wherein the heating structure heats the medium; at least one temperature sensor element assigned to the first area, which temperature sensor element is arranged so as to be spaced apart from the heating structure on the first dielectric layer and detects the temperature of the medium heated on the heating structure; and at least one protective layer which covers at least the at least one heating structure and the at least one temperature sensor element.

Abstract: A thin-film sensor for a thermal flowmeter with at least a first substrate layer made of electrically non-conductive material, a second layer made of electrically conductive material and a cover layer to protect the resistance layer against abrasion, wherein the second layer is designed as two sensor elements, wherein at least a first of the two sensor elements is designed to introduce a heat quantity into a medium, and at least a second of the two sensor elements is designed to determine the ambient temperature, and the thin-film sensor has a gap that isolates the two sensor elements from one another.