Patents by Inventor Thomas Schwarzbaeck

Thomas Schwarzbaeck has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Adjusting a beam diameter and an aperture angle of a laser beam
    Patent number: 10327318
    Abstract: Beam guiding devices for guiding a laser beam, in particular in a direction towards a target region for producing extreme ultraviolet (EUV) radiation, include an adjustment device for adjusting a beam diameter and an aperture angle of the laser beam. The adjustment device includes a first mirror having a first curved reflecting surface, a second mirror having a second curved reflecting surface, a third mirror having a third curved reflecting surface, a fourth mirror having a fourth curved reflecting surface, and a movement device configured to adjust the beam diameter and the aperture angle of the laser beam by moving the first reflecting surface and the fourth reflecting surface relative to one another and, independently thereof, moving the second reflecting surface and the third reflecting surface together relative to the first reflecting surface and the fourth reflecting surface.
    Type: Grant
    Filed: July 21, 2017
    Date of Patent: June 18, 2019
    Assignee: TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
    Inventors: Martin Lambert, Tolga Ergin, Thomas Schwarzbaeck
  • Adjusting a Beam Diameter and an Aperture Angle of a Laser Beam
    Publication number: 20170325325
    Abstract: Beam guiding devices for guiding a laser beam, in particular in a direction towards a target region for producing extreme ultraviolet (EUV) radiation, include an adjustment device for adjusting a beam diameter and an aperture angle of the laser beam. The adjustment device includes a first mirror having a first curved reflecting surface, a second mirror having a second curved reflecting surface, a third mirror having a third curved reflecting surface, a fourth mirror having a fourth curved reflecting surface, and a movement device configured to adjust the beam diameter and the aperture angle of the laser beam by moving the first reflecting surface and the fourth reflecting surface relative to one another and, independently thereof, moving the second reflecting surface and the third reflecting surface together relative to the first reflecting surface and the fourth reflecting surface.
    Type: Application
    Filed: July 21, 2017
    Publication date: November 9, 2017
    Inventors: Martin Lambert, Tolga Ergin, Thomas Schwarzbaeck