Abstract: A method for dielectrically insulating active electric parts A method for dielectrically insulating an active electric part wherein the electrical active part is arranged in a gas-tight housing comprising an insulating gas which contains or consists of a compound of formula (i) Rf1-(O)x-Rf2 wherein Rf1 and Rf2 are identical or different and designated fluorocarbon residues having a H/F ratio of equal to or less than 0.5 and x is 1, 2, or 3.

Abstract: The present invention relates to a method for manufacturing a solar cell from a silicon wafer comprising a step of etching the silicon wafer with specific gas mixtures comprising fluorine, hydrogen fluoride, one or more inert gases and optionally one or more a further gases, to silicon wafers produced using said method as well as to the use of said gas mixtures.

Abstract: A method for dielectrically insulating active electric parts A method for dielectrically insulating an active electric part wherein the electrical active part is arranged in a gas-tight housing comprising an insulating gas which contains or consists of a compound of formula (i) Rf1-(O)x-Rf2 wherein Rf1 and Rf2 are identical or different and designated fluorocarbon residues having a H/F ratio of equal to or less than 0.5 and x is 1, 2, or 3.

Abstract: A tube trailer containing a gas comprising from 35 to 92.5 vol % of molecular fluorine. A semiconductor manufacturing plant having a gas supply system wherein such tube trailer is connected to the gas supply system of the semiconductor manufacturing plant. A method for supplying a gas comprising using such tube trailer to transport gas from a gas manufacturing site to a user site.

Abstract: Elemental fluorine is used as etching agent for the manufacture of electronic devices, especially semiconductor devices, micro-electromechanical devices, thin film transistors, flat panel displays and solar panels, and as chamber cleaning agent mainly for plasma-enhanced chemical vapor deposition (PECVD) apparatus. For this purpose, fluorine often is produced on-site. The invention provides a process for the manufacture of electronic devices wherein fluorine is produced on site and is purified from HF by a low temperature treatment. A pressure of between 1.5 and 20 Bars absolute is especially advantageous.

Abstract: The invention relates to an abrasive means with abrasive-active fillers. The abrasive means is comprised, in general, of a support, abrasive grit and of a binder system. In order to improve the abrasive action and the serviceable life of the abrasive means, the binding agent system contains synthetic alkali metal fluoroaluminates, and/or alkaline earth metal fluoroaluminates, in particular, alkali metal tetrafluoroaluminate, preferably potassium tetrafluoroaluminate, together with at least one additional abrasive-active filler.

Abstract: Mixtures of fluorine and inert gases like nitrogen and/or argon can be used for etching of semiconductors, solar panels and flat panels (TFTs and LCDs), and for cleaning of semiconductor surfaces and plasma chambers. Preferably, fluorine is comprised in an amount of 15 to 25 vol.-% in binary mixtures. The gas mixtures can be used as substitute or drop-in for respective mixtures comprising NF3 and permit a very flexible operation of plasma apparatus. For example, apparatus tuned for NF3/Ar mixtures can be operated without further tuning using fluorine and argon, optionally together with nitrogen. The fluorine content is preferably in the range of 1 to 5 vol.-%, if ternary mixtures of fluorine, nitrogen and argon are used.

Abstract: A method for separating gaseous mixtures from underground cables or gas-insulated circuits in which the gaseous mixtures, which contain partially fluorinated and/or perfluorinated hydrocarbons and inert gases, are brought into contact with hydrophobic zeolites in at least one adsorption step so that the fluorinated hydrocarbons are adsorbed.

Abstract: A method of effectively purifying sulfuryl fluoride, which is useful as an insulating gas in electrical devices or as a pesticide and which frequently is contaminated with sulfur dioxide, hydrogen fluoride and/or hydrogen chloride. In the method, contaminated sulfuryl fluoride is contacted with or conducted over an alkali fluoride, e.g. potassium fluoride. The purification can be carried out during sulfuryl fluoride production, during storage of sulfuryl fluoride and/or before or during use of the sulfuryl fluoride, for example, as a pesticide.

Abstract: Gas mixtures of SF6 and N2 which have been used as an insulating filler gas for underground cables can be separated by use of a membrane separation in order to recover the SF6.

Abstract: Homogeneous compressed gas mixtures of perfluorinated and/or partially fluorinated hydrocarbons and a gas of lesser density are produced using an optionally mobile mixing station including at least the following components: a gas pre-mixing stage in which separately provided gases are brought together; a static mixer and/or buffer tank connected to the pre-mixing stage; and a compressor connected to the static mixer or buffer tank. If a buffer tank is used, a return line may be provided from the compressor outlet to the buffer tank. Mixtures of perfluorinated and/or partially fluorinated hydrocarbons and/or ethers and inert gases such as noble gases, CO2 or N2 and/or SF6, are obtained which are suitable as insulating gases for current-carrying underground cables or gas-insulated switches. High flow rates can be processed using the method, and mass flow meters ensure accuracy and reliability.

Abstract: A method for the recovery or separation of sulfur oxyfluorides from gas mixtures, in which the gas mixture passes through at least one adsorption stage or membrane stage containing or consisting of zeolites with a modulus >10. The sulfur oxyfluorides fixed to the adsorbent may be made available for use after desorption. The sulfur oxyfluorides enriched through the membrane can be re-used directly.

Abstract: An apparatus for determining the physical and/or chemical parameters of an aerosol formulation from a metered dose inhaler, including a housing (1) with a measuring chamber (8) therein, a multiple sampling head (3) having at least one valve, an opening for receiving the measuring electrode (2), and a mechanism for opening a metered dose inhaler cartridge (5) which includes a sleeve (4), connected detachably or non-detachably to the housing (1), for receiving the metered dose inhaler cartridge, a pin or a needle (7) attached to the surface facing the measuring chamber (8) and protruding into the sleeve (4) for opening the cartridge (5), an actuating element (6) for pressing the cartridge (5) against the pin or needle (7), seals for preventing undesired pressure equalization, and at least one connecting opening (7, 10) to the measuring chamber (8) through which the aerosol formulation can pass unchanged into the measuring chamber.

Abstract: A method for the recovery or separation of sulfur oxyfluorides from gas mixtures, in which the gas mixture passes through at least one adsorption stage or membrane stage containing or consisting of zeolites with a modulus >10. The sulfur oxyfluorides fixed to the adsorbent may be made available for use after desorption. The sulfur oxyfluorides enriched through the membrane can be re-used directly.

Abstract: Gas mixtures of SF6 and N2, which have been used, for example, as an insulating filler gas for underground cables, for insulating-gas window panes or as a filler gas for car tires and SF6/air mixtures which have been used as a protective gas when casting magnesium can be separated if they are contacted with hydrophobic zeolites of a certain pore size as selective adsorption agent for sulfur hexafluoride. For a relatively high SF6 concentration, the mixture is preferably first subjected to a membrane separation process and the permeate is contacted with the adsorption agent. The invention also relates to an apparatus for carrying out the process. The process may also be used for separating SF6 from exhaust gases.

Abstract: Gas mixtures of SF6 and N2 which have been used as an insulating filler gas for underground cables can be separated by use of a membrane separation in order to recover the SF6.

Abstract: A method of avoiding generation of waste water while brazing components made of aluminium or an aluminium alloy using a flux, especially a flux composed of an aqueous suspension of potassium fluoroaluminate. Since used suspension is replaced with fresh suspension after a given period of time and the apparatus regularly have to be cleaned, waste water is produced which contains flux, e.g. potassium fluoroaluminate. In the past, such waste water has been discharged into the environment. It has now been discovered that such waste water can be recycled to the brazing process after separation of the flux. In this manner, the production of waste water can be largely avoided. Since surfactants are frequently used, and these are likewise recirculated, a corresponding saving in terms of surfactant is possible. Furthermore, the environment is protected correspondingly.