Patents by Inventor Thomas Stotts

Thomas Stotts has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods for controlling the pressures of adjustable pressure zones of a work piece carrier during chemical mechanical planarization
    Patent number: 7115017
    Abstract: Methods are provided for controlling adjustable pressure zones of a CMP carrier. A method comprises determining a first thickness of a layer on a wafer underlying a first zone of the carrier. A first portion of the layer underlying the first zone is removed. The first zone is configured to exert a first pressure against the second surface of the wafer. A second thickness of the layer underlying the first zone is determined and a target thickness corresponding to a predetermined thickness profile is selected. A second pressure for the first zone is calculated using the first thickness, the second thickness, the first pressure, and the target thickness. The pressure exerted by the first zone against the second surface of the wafer is adjusted to the second pressure and the steps are repeated for a second zone.
    Type: Grant
    Filed: March 31, 2006
    Date of Patent: October 3, 2006
    Assignee: Novellus Systems, Inc.
    Inventors: Thomas Laursen, Justin Quarantello, Thomas Stotts, Paul Franzen