Abstract: The method enables optical measurements of an oscillatory, and particularly structured, membrane in an environment which is subjected to gas flows and/or acoustic excitations. A device for measuring the membrane is focused on the same. An optically transparent film is provided, and the film and the membrane are arranged in such a manner that the gas flows and/or the acoustic excitations reach the membrane only by passing through the film. The film enables a diminishing of the external air movements and thus oscillations of the membrane so that the membrane can be precisely measured.

Abstract: The method enables optical measurements of an oscillatory, and particularly structured, membrane in an environment which is subjected to gas flows and/or acoustic excitations. A device for measuring the membrane is focused on the same. An optically transparent film is provided, and the film and the membrane are arranged in such a manner that the gas flows and/or the acoustic excitations reach the membrane only by passing through the film. The film enables a diminishing of the external air movements and thus oscillations of the membrane so that the membrane can be precisely measured.

Abstract: A method and a device for analyzing structures of a photomask are described. In a first method step, at least one trench is created in the photomask, so that at least one lateral limitation of the trench forms a section through the structures to be analyzed. Then, the structures to be analyzed are scanned by scanning beams, which are guided through the trench on its lateral limitation.