Abstract: A photoacoustic gas sensor device for determining a value indicative of a presence or a concentration of a chemical component in a gas comprises a substrate and a measurement cell body arranged on a first side of the substrate. The substrate and the measurement cell body define a measurement cell. A cap is arranged on the first side of the substrate within the measurement cell. The cap and the substrate define a cap volume. The cap and the substrate acoustically seal the cap volume. A measurement volume is confined by the measurement cell body, the substrate and the cap. An aperture is provided in the measurement cell for the gas to enter the measurement volume. Electrical components are arranged on the first side of the substrate and in the measurement cell.

Abstract: A photoacoustic gas sensor device for determining a value indicative of a presence or a concentration of a chemical component in a gas comprises a substrate and a measurement cell body arranged on a first side of the substrate. The substrate and the measurement cell body define a measurement cell. A cap is arranged on the first side of the substrate within the measurement cell. The cap and the substrate define a cap volume. The cap and the substrate acoustically seal the cap volume. A measurement volume is confined by the measurement cell body, the substrate and the cap. An aperture is provided in the measurement cell for the gas to enter the measurement volume. Electrical components are arranged on the first side of the substrate and in the measurement cell.

Abstract: A photoacoustic gas sensor device for determining a value indicative of a presence or a concentration of a component in a gas comprises a measurement cell enclosing a measurement volume and a gas permeable area in the measurement cell for a gas to enter the measurement volume. An electromagnetic radiation source is arranged to emit electromagnetic radiation into the measurement volume, and a pressure transducer is arranged to measure a sound wave generated by the component in response to an absorption of electromagnetic radiation by the component in the measurement volume. In one aspect, the gas permeable area is represented by a porous gas permeable membrane with an average pore size of the porous gas permeable membrane between 10 nm and 1 ?m. In another aspect the gas permeable area is represented by an area of the measurement cell containing holes reaching through an otherwise gas tight material of the measurement cell, with a diameter of the holes between 100 nm and 10 ?m.

Abstract: A photoacoustic gas sensor device for deter-mining a value indicative of a presence or a concentration of a component in a gas comprises a substrate and a measurement cell body, the substrate and the measurement cell body defining a measurement cell enclosing a measurement volume. A reflective shield divides the measurement volume into a first volume and a second volume. An opening in the measurement cell is provided for a gas to enter the measurement volume. In the first volume and on a front side of the substrate are arranged: An electromagnetic radiation source for emitting electromagnetic radiation through an aperture in the reflective shield into the second volume; and a pressure transducer communicatively coupled to the second volume for measuring a sound wave generated by the component in response to an absorption of electromagnetic radiation by the component. At least a portion of a surface of the reflective shield facing the second volume is made of a material reflecting electromagnetic radiation.

Abstract: A photoacoustic gas sensor device is proposed for determining a value indicative of a presence or a concentration of a component in a gas. The photoacoustic gas sensor device comprises a substrate, and a measurement cell body arranged on a first side of the substrate. The substrate and the measurement cell body define a measurement cell enclosing a measurement volume. The measurement cell comprises an aperture for a gas to enter the measurement volume. The device further comprises an electromagnetic radiation source for emitting electromagnetic radiation, and a microphone for measuring a sound wave generated by the component in response to an absorption of electromagnetic radiation by the component. The electromagnetic radiation source and the microphone are arranged on the first side of the substrate and in the measurement volume. The microphone has a bottom port facing the substrate, and the measurement volume is communicatively coupled to the bottom port.

Abstract: An infrared device comprises a substrate. A configuration for emitting infrared radiation is supported by the substrate. The configuration comprises an electrically conducting layer arrangement of less than 50 nm thickness between dielectric layers. In addition, a heater arranged for heating the configuration to emit the infrared radiation is supported by the substrate.