Patents by Inventor Thomas W. Hobbs

Thomas W. Hobbs has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method to avoid striae in EUV lithography mirrors
    Patent number: 6776006
    Abstract: A method for manufacturing an EUV lithography element mirror includes sagging a plate of a glass material to produce an EUV mirror blank; and polishing a top face of the EUV mirror blank to produce a polished EUV mirror. A method for manufacturing an EUV lithography element mirror includes grinding a top face of a piece of a glass material; sagging a plate of the glass material over the top face of the piece to produce an EUV mirror blank; and polishing a top face of the EUV mirror blank to produce an EUV polished mirror.
    Type: Grant
    Filed: August 30, 2001
    Date of Patent: August 17, 2004
    Assignee: Corning Incorporated
    Inventors: Michael E. Best, Claude L. Davis, Jr., Mary J. Edwards, Thomas W. Hobbs, Gregory L. Murray
  • Method to avoid striae in EUV lithography mirrors
    Publication number: 20020043080
    Abstract: A method for manufacturing an EUV lithography element mirror includes sagging a plate of a glass material to produce an EUV mirror blank; and polishing a top face of the EUV mirror blank to produce a polished EUV mirror. A method for manufacturing an EUV lithography element mirror includes grinding a top face of a piece of a glass material; sagging a plate of the glass material over the top face of the piece to produce an EUV mirror blank; and polishing a top face of the EUV mirror blank to produce an EUV polished mirror.
    Type: Application
    Filed: August 30, 2001
    Publication date: April 18, 2002
    Inventors: Michael E. Best, Claude L. Davis, Mary J. Edwards, Thomas W. Hobbs, Gregory L. Murray