Abstract: A carrier for holding a substrate is described. The carrier includes a carrier body having a first surface, and an adhesive arrangement provided on the first surface. The carrier body includes one or more conduits configured for providing a gas into the adhesive arrangement. Further, a method for controlling a temperature of a substrate is described. The method includes providing a carrier as described herein; supplying a gas through the one or more conduits into the adhesive arrangement; and providing the gas to a backside of the substrate attached to the adhesive arrangement.

Abstract: A process for manufacturing a transparent body for use in a touch screen panel is provided.

Abstract: A process for manufacturing a transparent body for use in a touch screen panel is provided. The process includes depositing a first transparent layer stack over a first side of a transparent substrate, wherein said first transparent layer stack is selected from the group consisting of: a layer stack, wherein the layer stack includes a first dielectric film with a gradient refractive index from a first refractive index to a second refractive index, and a layer stack, wherein the layer stack includes at least a first dielectric film with a first refractive index and a second dielectric film with a second refractive index different from the first refractive index.

Abstract: The present disclosure provides a system configured for sputter deposition on a substrate. The system includes a sputter deposition chamber having a processing zone, one or more sputter deposition sources arranged at a first side of the processing zone, and a shielding device arranged at a second side of the processing zone, wherein the shielding device includes a frame assembly mounted to the sputter deposition chamber and one or more conductive sheets detachably mounted on the frame assembly, wherein the one or more conductive sheets provide a surface arranged along the processing zone.

Abstract: The present disclosure provides a masking device for use in a lithium deposition process in the manufacturing of thin film batteries. The masking device includes a mask portion made of a metal or metal alloy, and one or more openings in the mask portion, wherein the one or more openings are configured to allow particles of a deposition material to pass through the mask portion, and wherein a size of each opening of the one or more openings, is at least 0.5 cm2.

Abstract: A sputtering source is described. The sputtering source includes a backing support having a target receiving surface and a further surface opposing the target receiving surface, and at least one magnet assembly provided adjacent the further surface, wherein the target receiving surface of the backing support has at least one recess, wherein the recess is provided opposite to the magnet assembly.

Abstract: A carrier for supporting at least one substrate during a sputter deposition process is provided. The carrier includes a carrier body and an insulating portion provided at the carrier body. The insulating portion provides a surface of an electrically insulating material, wherein the surface is configured to face one or more sputter deposition sources during the sputter deposition process.

Abstract: A process for manufacturing a transparent body for use in a touch screen panel is provided. The process includes depositing a first transparent layer stack over a first side of a transparent substrate, wherein said first transparent layer stack is selected from the group consisting of: a layer stack, wherein the layer stack includes a first dielectric film with a gradient refractive index from a first refractive index to a second refractive index, and a layer stack, wherein the layer stack includes at least a first dielectric film with a first refractive index and a second dielectric film with a second refractive index different from the first refractive index.

Abstract: An apparatus for depositing a material on a substrate is described. The apparatus includes a vacuum chamber; a substrate receiving portion in the vacuum chamber for receiving the substrate during deposition of the material; a target support configured to hold a target during deposition of the material on the substrate; a plasma generating device in the vacuum chamber for generating a plasma between the substrate receiving portion and the target support; and a first gas inlet for providing a supersonic stream of a gas, wherein the gas inlet is directed towards the substrate receiving portion. Further, a method for depositing a material on a substrate in a vacuum chamber is described. The method includes forming a plasma between the substrate and a target; releasing particles from the target using the plasma; and directing a supersonic stream of gas towards the substrate surface, on which the material is to be deposited.

Abstract: A process for manufacturing a transparent body for use in a touch screen panel is provided. The process includes: depositing a first transparent layer stack over a transparent substrate, wherein said first transparent layer stack includes at least a first dielectric film with a first refractive index, and a second dielectric film with a second refractive index different from the second the first refractive index; providing a structured transparent conductive film in a manner such that the first transparent layer stack and the transparent conductive film are disposed over the substrate in this order, and wherein the structured transparent conductive film has a sheet resistance of 100 Ohm/square or below; and providing a transparent adhesive onto the structured transparent conductive film configured for attaching the layer stack to the touch screen panel.

Abstract: A process for manufacturing a transparent body for use in a touch screen panel is provided.