Abstract: A device for bombarding at least one substrate with a plasma with a first electrode and a second electrode that can be arranged opposite thereto, which electrodes are formed together producing the plasma between the electrodes wherein at least one of the electrodes is formed from at least two electrode units. In addition, this invention relates to a corresponding method.

Abstract: A device and a method for holding, rotating, heating and/or cooling a substrate. The device comprises a rotor, having: at least one secondary winding, a substrate holder with a substrate holder surface and fixing elements for fixing the substrate, a rotary shaft for rotating the substrate holder around a rotary axis, at least one electric heater for heating and/or a cooler for cooling the substrate holder surface; and a stator, having: at least one primary winding, a ring-shaped base, wherein the rotary shaft of the rotor is arranged at least partially inside the base; and wherein a current and/or a voltage is induced in the at least one secondary winding by the at least one primary winding, the induced current and/or voltage used to power the at least one heater and/or cooler so that the substrate holder surface is heated and/or cooled.

Abstract: A device and method for treatment of a substrate treatment surface of a substrate with a fluid by immersion of the substrate treatment surface into the fluid. The device includes: receiving means for receiving the fluid with an immersion opening and immersion means for immersion of the substrate treatment surfaces through the immersion opening into the receiving means, Rotation means are provided for rotation of the receiving means for at least predominant discharge of the fluid from the receiving means.

Abstract: A device for bombarding at least one substrate with a plasma with a first electrode fiend a second electrode that can be arranged opposite thereto, which electrodes are formed together producing the plasma between the electrodes wherein at least one of the electrodes is formed from at least two electrode units. In addition, this invention relates to a corresponding method.

Abstract: A method for treatment of a substrate surface of a substrate by applying a liquid to the substrate surface, the liquid which has been applied to the substrate surface being heated by a heating area which is located above the substrate surface, wherein the temperature of the liquid is kept constant by moving the heating area up and down. Furthermore the invention relates to a corresponding device.

Abstract: Novel fusion molecules and uses are disclosed.

Abstract: A device and method for treatment of a substrate treatment surface of a substrate with a fluid by immersion of the substrate treatment surface into the fluid, The device includes: receiving means for receiving the fluid with an immersion opening and immersion means for immersion of the substrate treatment surfaces through the immersion opening into the receiving means, Rotation means are provided for rotation of the receiving means for at least predominant discharge of the fluid from the receiving means.