Patents by Inventor Thomas Willkens

Thomas Willkens has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of manufacturing an optical element
    Patent number: 7738117
    Abstract: A method of manufacturing an optical element involves an interferometric test of the optical element using an interferometer system of a Fizeau type combined with principles of white-light interferometry. The optical element is disposed in a cavity between a Fizeau surface and a mirror, and an optical path difference between a back surface of the optical element and the mirror is determined for determining parameters of the optical element, such as a thickness thereof. Measuring light from an optical delay apparatus can be supplied to the Fizeau interferometer through an optical fiber.
    Type: Grant
    Filed: September 28, 2007
    Date of Patent: June 15, 2010
    Assignee: Carl Zeiss SMT AG
    Inventors: Michael Altenberger, Bernd Doerband, Thomas Willkens
  • Method of manufacturing an optical element
    Publication number: 20080117436
    Abstract: A method of manufacturing an optical element involves an interferometric test of the optical element using an interferometer system of a Fizeau type combined with principles of white-light interferometry. The optical element is disposed in a cavity between a Fizeau surface and a mirror, and an optical path difference between a back surface of the optical element and the mirror is determined for determining parameters of the optical element, such as a thickness thereof. Measuring light from an optical delay apparatus can be supplied to the Fizeau interferometer through an optical fiber.
    Type: Application
    Filed: September 28, 2007
    Publication date: May 22, 2008
    Applicant: Carl Zeiss SMT AG
    Inventors: Michael Altenberger, Bernd Doerband, Thomas Willkens