Abstract: A MEMS mirror array module can be used in photolithographic projection exposure apparatuses.

Abstract: An optical system comprises a plurality of actuable optical elements and a plurality of actuator/sensor devices for actuating and/or sensing the optical elements. The optical system has a supply device for providing a supply voltage for a number of electrical loads of the optical system. The supply device has a parallel connection of a plurality N, where N?3, of supply rails with a respective power supply unit. The respective power supply unit of the N supply rails is configured to provide a predetermined power supply unit output power on the output side at a supply node in fault-free operation of the supply device and to provide N N - 1 times the predetermined power supply unit output power at the supply node in faulty operation.

Abstract: An optical system for a lithography system comprises: a number of optical elements for guiding radiation; a support device supporting the optical elements; and a plurality of active and/or passive components. The active and/or passive components are arranged on the support device in at least two different planes. The active and/or passive components are arranged on one side of the support device.

Abstract: A mirror arrangement, for example for a lithography system, comprises: a plurality of mirror elements, for example in the form of MEMS mirror modules, for reflecting radiation; a plurality of carrier elements, each having a head region for accommodating one of the mirror elements; and a mount arrangement comprising insert openings, which are designed to accommodate a respective seat portion of the carrier elements. The plurality of carrier elements are accommodated with the seat portions in the insert openings in the mount arrangement. Each carrier element comprises a channel device for guiding a coolant, which comprises an inlet for the coolant and an outlet for the coolant.

Abstract: An assembly for an optical system having a mirror array having a plurality of mirror elements arranged on a first carrier. The first carrier contains control leads to the mirror elements. A first heat transport path can dissipate heat from the mirror array to a cooling mechanism during the operation of the optical system. At least one second heat transport path dissipates heat from the mirror array to a cooling mechanism during the operation of the optical system. The first heat transport path and the at least one second heat transport path are spatially separated from one another at least in regions. The first heat transport path extends via an interface component. The first heat transport path extends via the first carrier and the interface component from the mirror array to a cooling mechanism surrounding the interface component.

Abstract: A connector arrangement includes a first connector element, a second connector element, a first printed circuit board section and a second printed circuit board section. The second connector element can be plugged together with the first connector element in an insertion direction to form an electrical connection. The first connector is mounted on the first printed circuit board section. The first printed circuit board section is mounted on the second printed circuit board section such that the first printed circuit board section is movable perpendicularly to the insertion direction. This can bring about tolerance compensation when the first and second connector elements are plugged together.

Abstract: A component for a projection exposure apparatus includes a printed circuit board arranged in an encapsulated housing and having electronic component parts, and a heat conducting structure for dissipating heat from the electronic component parts to an outer side of the housing.

Abstract: A component for a projection exposure apparatus includes a printed circuit board arranged in an encapsulated housing and having electronic component parts, and a heat conducting structure for dissipating heat from the electronic component parts to an outer side of the housing.