Abstract: An optical microphone assembly comprises a rigid substrate; an interferometric arrangement, a light source, at least one photo detector and an enclosure. The interferometric arrangement comprises a membrane and at least one optical element spaced from the membrane, wherein the at least one optical element comprises a surface of the substrate and/or is disposed on a surface of the substrate. The light source is arranged to provide light to the interferometric arrangement such that a first portion of the light propagates along a first optical path via the interferometric arrangement and a second portion of the light propagates along a second different optical path via the interferometric arrangement, thereby giving rise to an optical path difference between the first and second optical paths which depends on a distance between the membrane and the optical element.

Abstract: An optical microphone assembly comprises a rigid substrate; an interferometric arrangement, a light source, at least one photo detector and an enclosure. The interferometric arrangement comprises a membrane and at least one optical element spaced from the membrane, wherein the at least one optical element comprises a surface of the substrate and/or is disposed on a surface of the substrate. The light source is arranged to provide light to the interferometric arrangement such that a first portion of the light propagates along a first optical path via the interferometric arrangement and a second portion of the light propagates along a second different optical path via the interferometric arrangement, thereby giving rise to an optical path difference between the first and second optical paths which depends on a distance between the membrane and the optical element.

Abstract: This invention relates to a source for emitting radiation in the infrared range comprising a thin membrane including a radiation element made from a semi-conductive material having a chosen dopant, the radiation element being connected to a frame, the frame comprising connector means for connecting to a power source for conducting an electrical current through the substrate, the radiation element being provided with a periodic modulation of the refractive index constituting a photonic crystal having a chosen period, thus defining an optical resonator at one or more chosen wavelengths, and wherein the membrane is mounted to the substrate through a number of conductor beams distributed along the membrane circumference so as to provide an even current distribution and thus even heating over the membrane.

Abstract: The present invention relates to a displacement sensor device and the system including the device, wherein the device comprises a first at least partially transparent plane surface with a first diffraction pattern and a second plane surface comprising a second reflecting diffraction pattern. The diffractive patterns being adapted to diffract light within a chosen range of wavelengths, the second surface being positioned below and parallel to the first surface constituting a pair wherein said first and second diffractive patterns being essentially equal, the device also comprising displacement means for allowing a movement in a direction parallel to said surfaces, the device thus providing a movement sensitive diffraction pattern.

Abstract: The present invention relates to an optical displacement sensor comprising a first at least partially reflective surface and a second surface having a diffractive pattern, the surfaces being provided on elements having a variable distance between them, each surface pair defining a cavity between them. The sensor also comprising at least one light source transmitting light at least one a chosen wavelength range into said cavities and at least one light detector receiving light from the cavities, wherein said diffractive patterns are adapted to direct light toward at least one detector provided in a known position relative to said diffractive surfaces.

Abstract: The present invention relates to a displacement sensor device and the system including the device, wherein the device comprises a first at least partially transparent plane surface with a first diffraction pattern and a second plane surface comprising a second reflecting diffraction pattern. The diffractive patterns being adapted to diffract light within a chosen range of wavelengths, the second surface being positioned below and parallel to the first surface constituting a pair wherein said first and second diffractive patterns being essentially equal, the device also comprising displacement means for allowing a movement in a direction parallel to said surfaces, the device thus providing a movement sensitive diffraction pattern.

Abstract: The present invention relates to an optical displacement sensor comprising a first at least partially reflective surface and a second surface having a diffractive pattern, the surfaces being provided on elements having a variable distance between them, each surface pair defining a cavity between them. The sensor also comprising at least one light source transmitting light at least one a chosen wavelength range into said cavities and at least one light detector receiving light from the cavities, wherein said diffractive patterns are adapted to direct light toward at least one detector provided in a known position relative to said diffractive surfaces.

Abstract: The present invention relates to a displacement sensor device and the system including the device, wherein the device comprises a first at least partially transparent plane surface with a first diffraction pattern and a second plane surface comprising a second reflecting diffraction pattern. The diffractive patterns being adapted to diffract light within a chosen range of wavelengths, the second surface being positioned below and parallel to the first surface constituting a pair wherein said first and second diffractive patterns being essentially equal, the device also comprising displacement means for allowing a movement in a direction parallel to said surfaces, the device thus providing a movement sensitive diffraction pattern.

Abstract: The present invention relates to an optical displacement sensor comprising a first at least partially reflective surface and a second surface having a diffractive pattern, the surfaces being provided on elements having a variable distance between them, each surface pair defining a cavity between them. The sensor also comprising at least one light source transmitting light at least one a chosen wavelength range into said cavities and at least one light detector receiving light from the cavities, wherein said diffractive patterns are adapted to direct light toward at least one detector provided in a known position relative to said diffractive surfaces.

Abstract: This invention relates to a source for emitting radiation in the infrared range comprising a thin membrane including a radiation element made from a semi-conductive material having a chosen dopant, the radiation element being connected to a frame, the frame comprising connector means for connecting to a power source for conducting an electrical current through the substrate, the radiation element being provided with a periodic modulation of the refractive index constituting a photonic crystal having a chosen period, thus defining an optical resonator at one or more chosen wavelengths, and wherein the membrane is mounted to the substrate through a number of conductor beams distributed along the membrane circumference so as to provide an even current distribution and thus even heating over the membrane.

Abstract: The present invention relates to a displacement sensor device and the system including the device, wherein the device comprises a first at least partially transparent plane surface with a first diffraction pattern and a second plane surface comprising a second reflecting diffraction pattern. The diffractive patterns being adapted to diffract light within a chosen range of wavelengths, the second surface being positioned below and parallel to the first surface constituting a pair wherein said first and second diffractive patterns being essentially equal, the device also comprising displacement means for allowing u movement in a direction parallel to said surfaces, the device thus providing a movement sensitive diffraction pattern.

Abstract: The present invention relates to an optical displacement sensor comprising a first at least partially reflective surface and a second surface having a diffractive pattern, the surfaces being provided on elements having a variable distance between them, each surface pair defining a cavity between them. The sensor also comprising at least one light source transmitting light at least one a chosen wavelength range into said cavities and at least one light detector receiving light from the cavities, wherein said diffractive patterns are adapted to direct light toward at least one detector provided in a known position relative to said diffractive surfaces.

Abstract: The present invention relates to an actuator for moving a rigid element, e.g. an optical element such as mirror, the element being mechanically coupled to a frame with a bendable coupling, wherein actuator elements are mounted on said coupling between the frame and element, the coupling and actuator elements being adapted to provide a movement to the element when subject to signal from a signal generator.

Abstract: The present invention relates to an actuator for moving a rigid element, e.g. an optical element such as mirror (1), the element being mechanically coupled to a frame (4) with a bendable coupling (2A), wherein actuator elements (3A, 3B) are mounted on said coupling between the frame and element, the coupling and actuator elements being adapted to provide a movement to the element when subject to signal from a signal generator.

Abstract: The present invention relates to an actuator for moving a rigid element, e.g. an optical element such as minor, the element being mechanically coupled to a frame with a bendable coupling, wherein actuator elements are mounted on said coupling between the frame and element, the coupling and actuator elements being adapted to provide a movement to the element when subject to signal from a signal generator.

Abstract: The invention relates to a micromechanical unit, in particular, an adjustable optical filter, and also a method to manufacture the unit. The unit comprises a first device layer and a second substrate layer at least partially fastened to each other, where the device layer comprises a number of reflecting elements divided between a number of non movable, fixed reflecting elements, where the fixed elements are connected with the substrate, and where a cavity is defined between the substrate and each movable element and each movable element is set up to produce a spring-loaded movement into the cavity, and where a number of dielectric spacer blocks are placed in the cavities between each movable element and the substrate to avoid electric contact between them.

Abstract: The present invention relates to an actuator for moving a rigid element, e.g. an optical element such as mirror (1), the element being mechanically coupled to a frame (4) with a bendable coupling (2A), wherein actuator elements (3A, 3B) are mounted on said coupling between the frame and element, the coupling and actuator elements being adapted to provide a movement to the element when subject to signal from a signal generator.

Abstract: An apparatus for housing a micromechanical system includes a substrate with a surface on which the micromechanical system is formed, a transparent cover and a dry film layer arrangement between the surface of the substrate and the transparent cover. The dry film layer arrangement has an opening, so that the micromechanical system adjoins the opening.

Abstract: An apparatus for housing a micromechanical system includes a substrate with a surface on which the micromechanical system is formed, a transparent cover and a dry film layer arrangement between the surface of the substrate and the transparent cover. The dry film layer arrangement has an opening, so that the micromechanical system adjoins the opening.

Abstract: A method of producing a device with a movable portion spaced apart from a support wafer comprises a step of providing the support wafer having a structured surface and a further step of providing a device wafer with a backing layer and a device layer disposed thereon. Further, the method comprises the step of generating a first planarization layer from a first starting material on the support wafer with a first method to fill in the structures of the structured surface of the support wafer, whereby a surface with a first degree of planarization is obtained. Further, the method comprises a step of generating a second planarization layer from a second starting material on the planarized surface of the support wafer with a second method to obtain a surface with a second degree of planarization, which is higher than the first degree of planarization, wherein the first and second planarization layers can be removed together.