Patents by Inventor Thor Juneau
Thor Juneau has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11799449Abstract: A microelectromechanical system (MEMS) resonator includes a resonant semiconductor structure, drive electrode, sense electrode and electrically conductive shielding structure. The first drive electrode generates a time-varying electrostatic force that causes the resonant semiconductor structure to resonate mechanically, and the first sense electrode generates a timing signal in response to the mechanical resonance of the resonant semiconductor structure. The electrically conductive shielding structure is disposed between the first drive electrode and the first sense electrode to shield the first sense electrode from electric field lines emanating from the first drive electrode.Type: GrantFiled: November 30, 2022Date of Patent: October 24, 2023Assignee: SiTime CorporationInventors: David Raymond Pedersen, Aaron Partridge, Thor Juneau
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Patent number: 11545959Abstract: A microelectromechanical system (MEMS) resonator includes a resonant semiconductor structure, drive electrode, sense electrode and electrically conductive shielding structure. The first drive electrode generates a time-varying electrostatic force that causes the resonant semiconductor structure to resonate mechanically, and the first sense electrode generates a timing signal in response to the mechanical resonance of the resonant semiconductor structure. The electrically conductive shielding structure is disposed between the first drive electrode and the first sense electrode to shield the first sense electrode from electric field lines emanating from the first drive electrode.Type: GrantFiled: May 14, 2021Date of Patent: January 3, 2023Assignee: SiTime CorporationInventors: David Raymond Pedersen, Aaron Partridge, Thor Juneau
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Patent number: 11444600Abstract: A microelectromechanical system (MEMS) resonator includes a resonant semiconductor structure, drive electrode, sense electrode and electrically conductive shielding structure. The first drive electrode generates a time-varying electrostatic force that causes the resonant semiconductor structure to resonate mechanically, and the first sense electrode generates a timing signal in response to the mechanical resonance of the resonant semiconductor structure. The electrically conductive shielding structure is disposed between the first drive electrode and the first sense electrode to shield the first sense electrode from electric field lines emanating from the first drive electrode.Type: GrantFiled: March 11, 2021Date of Patent: September 13, 2022Assignee: SiTime CorporationInventors: David Raymond Pedersen, Aaron Partridge, Thor Juneau
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Patent number: 11012049Abstract: A microelectromechanical system (MEMS) resonator includes a resonant semiconductor structure, drive electrode, sense electrode and electrically conductive shielding structure. The first drive electrode generates a time-varying electrostatic force that causes the resonant semiconductor structure to resonate mechanically, and the first sense electrode generates a timing signal in response to the mechanical resonance of the resonant semiconductor structure. The electrically conductive shielding structure is disposed between the first drive electrode and the first sense electrode to shield the first sense electrode from electric field lines emanating from the first drive electrode.Type: GrantFiled: September 11, 2019Date of Patent: May 18, 2021Assignee: SiTime CorporationInventors: David Raymond Pedersen, Aaron Partridge, Thor Juneau
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Patent number: 10439590Abstract: A microelectromechanical system (MEMS) resonator includes a resonant semiconductor structure, drive electrode, sense electrode and electrically conductive shielding structure. The first drive electrode generates a time-varying electrostatic force that causes the resonant semiconductor structure to resonate mechanically, and the first sense electrode generates a timing signal in response to the mechanical resonance of the resonant semiconductor structure. The electrically conductive shielding structure is disposed between the first drive electrode and the first sense electrode to shield the first sense electrode from electric field lines emanating from the first drive electrode.Type: GrantFiled: May 21, 2018Date of Patent: October 8, 2019Assignee: SiTime CorporationInventors: David Raymond Pedersen, Aaron Partridge, Thor Juneau
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Patent number: 10003320Abstract: A microelectromechanical system (MEMS) resonator includes a resonant semiconductor structure, drive electrode, sense electrode and electrically conductive shielding structure. The first drive electrode generates a time-varying electrostatic force that causes the resonant semiconductor structure to resonate mechanically, and the first sense electrode generates a timing signal in response to the mechanical resonance of the resonant semiconductor structure. The electrically conductive shielding structure is disposed between the first drive electrode and the first sense electrode to shield the first sense electrode from electric field lines emanating from the first drive electrode.Type: GrantFiled: May 15, 2017Date of Patent: June 19, 2018Assignee: SiTime CorporationInventors: David Raymond Pedersen, Aaron Partridge, Thor Juneau
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Patent number: 9667223Abstract: A microelectromechanical system (MEMS) resonator includes a resonant semiconductor structure, drive electrode, sense electrode and electrically conductive shielding structure. The first drive electrode generates a time-varying electrostatic force that causes the resonant semiconductor structure to resonate mechanically, and the first sense electrode generates a timing signal in response to the mechanical resonance of the resonant semiconductor structure. The electrically conductive shielding structure is disposed between the first drive electrode and the first sense electrode to shield the first sense electrode from electric field lines emanating from the first drive electrode.Type: GrantFiled: November 12, 2015Date of Patent: May 30, 2017Assignee: SiTime CorporationInventors: David Raymond Pedersen, Aaron Partridge, Thor Juneau
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Patent number: 9252740Abstract: A MEMS resonator system that reduces interference signals arising from undesired capacitive coupling between different system elements. The system, in one embodiment, includes a MEMS resonator, electrodes, and at least one resonator electrode shield. In certain embodiments, the resonator electrode shield ensures that the resonator electrodes interact with either one or more shunting nodes or the active elements of the MEMS resonator by preventing or reducing, among other things, capacitive coupling between the resonator electrodes and the support and auxiliary elements of the MEMS resonator structure. By reducing the deleterious effects of interfering signals using one or more resonator electrode shields, a simpler, lower interference, and more efficient system relative to prior art approaches is presented.Type: GrantFiled: June 9, 2014Date of Patent: February 2, 2016Assignee: SiTime CorporationInventors: David Raymond Pedersen, Aaron Partridge, Thor Juneau
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Patent number: 8749315Abstract: A MEMS resonator system that reduces interference signals arising from undesired capacitive coupling between different system elements. The system, in one embodiment, includes a MEMS resonator, electrodes, and at least one resonator electrode shield. In certain embodiments, the resonator electrode shield ensures that the resonator electrodes interact with either one or more shunting nodes or the active elements of the MEMS resonator by preventing or reducing, among other things, capacitive coupling between the resonator electrodes and the support and auxiliary elements of the MEMS resonator structure. By reducing the deleterious effects of interfering signals using one or more resonator electrode shields, a simpler, lower interference, and more efficient system relative to prior art approaches is presented.Type: GrantFiled: July 30, 2012Date of Patent: June 10, 2014Assignee: SiTime CorporationInventors: David Raymond Pedersen, Aaron Partridge, Thor Juneau
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Publication number: 20140028410Abstract: A MEMS resonator system that reduces interference signals arising from undesired capacitive coupling between different system elements. The system, in one embodiment, includes a MEMS resonator, electrodes, and at least one resonator electrode shield. In certain embodiments, the resonator electrode shield ensures that the resonator electrodes interact with either one or more shunting nodes or the active elements of the MEMS resonator by preventing or reducing, among other things, capacitive coupling between the resonator electrodes and the support and auxiliary elements of the MEMS resonator structure. By reducing the deleterious effects of interfering signals using one or more resonator electrode shields, a simpler, lower interference, and more efficient system relative to prior art approaches is presented.Type: ApplicationFiled: July 30, 2012Publication date: January 30, 2014Inventors: David Raymond Pedersen, Aaron Partridge, Thor Juneau
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Patent number: 8570904Abstract: A system for determining node locations comprises an interface for receiving a first set of measurements at a first set of nodes, the first set of nodes having known locations. The system further comprising an interface for receiving a second set of measurements at a node having an unknown location, and a processor configured for determining a location of the node with unknown location based at least in part on the first set of measurements and the second set of measurements.Type: GrantFiled: December 20, 2011Date of Patent: October 29, 2013Assignee: Dust Networks, Inc.Inventors: Mark Lemkin, Thor Juneau, Lance R. Doherty
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Patent number: 8283987Abstract: One embodiment of the present invention sets forth a MEMS resonator system that reduces interference signals arising from undesired capacitive coupling between different system elements. The system includes a MEMS resonator, two or more resonator electrodes, and at least one resonator electrode shield. The resonator electrode shield ensures that the resonator electrodes interact with either one or more shunting nodes or the active elements of the MEMS resonator by preventing or reducing, among other things, capacitive coupling between the resonator electrodes and the support and auxiliary elements of the MEMS resonator structure. By reducing the deleterious effects of interfering signals using one or more resonator electrode shields, a simpler, lower interference, and more efficient system relative to prior art approaches is presented.Type: GrantFiled: October 4, 2010Date of Patent: October 9, 2012Assignee: SiTime CorporationInventors: David Raymond Pedersen, Aaron Partridge, Thor Juneau
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Publication number: 20120087272Abstract: A system for determining node locations comprises an interface for receiving a first set of measurements at a first set of nodes, the first set of nodes having known locations. The system further comprising an interface for receiving a second set of measurements at a node having an unknown location, and a processor configured for determining a location of the node with unknown location based at least in part on the first set of measurements and the second set of measurements.Type: ApplicationFiled: December 20, 2011Publication date: April 12, 2012Applicant: DUST NETWORKS, INC.Inventors: Mark Lemkin, Thor Juneau, Lance R. Doherty
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Patent number: 8102784Abstract: A system for determining node locations comprises an interface for receiving a first set of measurements at a first set of nodes, the first set of nodes having known locations. The system further comprising an interface for receiving a second set of measurements at a node having an unknown location, and a processor configured for determining a location of the node with unknown location based at least in part on the first set of measurements and the second set of measurements.Type: GrantFiled: February 18, 2009Date of Patent: January 24, 2012Assignee: Dust Networks, Inc.Inventors: Mark Lemkin, Thor Juneau, Lance R. Doherty
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Publication number: 20110018648Abstract: One embodiment of the present invention sets forth a MEMS resonator system that reduces interference signals arising from undesired capacitive coupling between different system elements. The system includes a MEMS resonator, two or more resonator electrodes, and at least one resonator electrode shield. The resonator electrode shield ensures that the resonator electrodes interact with either one or more shunting nodes or the active elements of the MEMS resonator by preventing or reducing, among other things, capacitive coupling between the resonator electrodes and the support and auxiliary elements of the MEMS resonator structure. By reducing the deleterious effects of interfering signals using one or more resonator electrode shields, a simpler, lower interference, and more efficient system relative to prior art approaches is presented.Type: ApplicationFiled: October 4, 2010Publication date: January 27, 2011Inventors: David Raymond Redersen, Aaron Partridge, Thor Juneau
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Patent number: 7808332Abstract: One embodiment of the present invention sets forth a MEMS resonator system that reduces interference signals arising from undesired capacitive coupling between different system elements. The system includes a MEMS resonator, two or more resonator electrodes, and at least one resonator electrode shield. The resonator electrode shield ensures that the resonator electrodes interact with either one or more shunting nodes or the active elements of the MEMS resonator by preventing or reducing, among other things, capacitive coupling between the resonator electrodes and the support and auxiliary elements of the MEMS resonator structure. By reducing the deleterious effects of interfering signals using one or more resonator electrode shields, a simpler, lower interference, and more efficient system relative to prior art approaches is presented.Type: GrantFiled: March 24, 2008Date of Patent: October 5, 2010Assignee: SiTime CorporationInventors: David Raymond Pedersen, Aaron Partridge, Thor Juneau
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Patent number: 6892576Abstract: Accelerometer offset is reduced by forming mass support structures within an inner periphery of the mass, affixing the mass support structures to the substrate by at least one anchor positioned near the mass' center of mass, and affixing the sensing fingers proximate to the anchor. The mass support structures can be affixed to the substrate using a single anchor or multiple anchors that are positioned close together. The sensing fingers can be affixed to the substrate or to the mass support structures. The mass is typically suspended from within its periphery but toward its outer periphery.Type: GrantFiled: July 18, 2003Date of Patent: May 17, 2005Assignee: Analog Devices, Inc.Inventors: Howard R. Samuels, David C. Hollocher, Michael Judy, Thor Juneau
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Patent number: 6822370Abstract: A microactuator is disclosed including one or more stationary plates formed on a substrate, a mirror base plate on which a mirror is formed, and one or more actuation plates coupled to the mirror base plate by one or more microspring mechanisms. The mirror base plate, the one or more actuation plates and the one or more microspring mechanisms are suspended over the stationary plates by one or more anchors. The stationary plates and the actuation plates are formed of a doped material so as to be electrically conductive. Upon application of a voltage potential between the respective plates, the actuation plates are pulled down toward the stationary plates, thus exerting a drive force on the base mirror plate to actuate the mirror between switching positions.Type: GrantFiled: March 6, 2002Date of Patent: November 23, 2004Assignee: Analog Devices, Inc.Inventors: William A. Clark, Thor Juneau, James Doscher
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Publication number: 20040055382Abstract: Accelerometer offset is reduced by forming mass support structures within an inner periphery of the mass, affixing the mass support structures to the substrate by at least one anchor positioned near the mass' center of mass, and affixing the sensing fingers proximate to the anchor. The mass support structures can be affixed to the substrate using a single anchor or multiple anchors that are positioned close together. The sensing fingers can be affixed to the substrate or to the mass support structures. The mass is typically suspended from within its periphery but toward its outer periphery.Type: ApplicationFiled: July 18, 2003Publication date: March 25, 2004Inventors: Howard R. Samuels, David C. Hollocher, Michael Judy, Thor Juneau
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Patent number: 6703679Abstract: A microfabricated device includes a substrate having a device layer and substantially filled, isolating trenches; a doped region of material formed by photolithographically defining a region for selective doping of said device layer, selectively doping said region, and thermally diffusing said dopant; circuits on said device layer formed using a substantially standard circuit technology; and at least one structure trench in the substrate which completes the definition of electrically isolated micromechanical structural elements.Type: GrantFiled: July 7, 2000Date of Patent: March 9, 2004Assignee: Analog Devices, IMI, Inc.Inventors: Mark A. Lemkin, William A. Clark, Thor Juneau, Allen W. Roessig