Abstract: A micromechanical rotation rate sensor with a sensor element. The micromechanical rotation rate sensor including a drive device for driving an oscillation of the sensor element and an acquisition device for acquiring a measurement signal. The acquisition device includes a first and second electrode structure for acquiring a mechanical deflection or a force effect of the sensor element parallel to an acquisition direction provided substantially perpendicular to the drive direction. A variable capacitance may be formed between the sensor element and the first electrode structure and between the sensor element and the second electrode structure. The acquisition device is provided for differential acquisition of the variable capacitances, which each comprise a static capacitance component and a dynamic capacitance component provided for the opposite variation.

Abstract: A micromechanical sensor system including a rotation rate sensor and a method for operating the system. The rotation rate sensor includes a seismic mass, and a drive device. For driving, the seismic mass is subjected to an offset voltage and a drive voltage. The seismic mass is excited to oscillate using the drive voltage. The rotation rate sensor can selectively be operated in a start-up mode and in an operating mode. The offset voltage during operation of the rotation rate sensor in the start-up mode is different from the offset voltage during operation of the rotation rate sensor in the operating mode, and/or the maximum voltage available from the driver of the drive voltage during operation of the rotation rate sensor in the start-up mode is different from the maximum voltage available during operation of the rotation rate sensor in the operating mode.

Abstract: A micromechanical component for a rotation rate sensor. The micromechanical component includes two rotor masses, mirror symmetrical with respect to a first plane of symmetry aligned perpendicularly to a substrate surface and passing through the center of the two rotor masses, which may be set in rotational vibrating motion about rotational axes aligned perpendicularly to the substrate surface, and four seismic masses, mirror symmetrical with respect to the first plane of symmetry, deflectable in parallel to the first plane of symmetry using the two rotor masses set in their respective rotational vibrating motion. The first rotor mass and a first pair of the four seismic masses connected thereto are mirror symmetrical to the second rotor mass and to a second pair of the four seismic masses connected thereto with respect to a second plane of symmetry aligned perpendicularly to the substrate surface and to the first plane of symmetry.

Abstract: An operator device for a capacitive sensor. The device includes an electronic device, by means of which an actual gap distance between the seismic mass and the at least one electrode and/or an actual variable for a sensitivity of the capacitive sensor can be determined, taking into account at least a first constant voltage, a first natural frequency of a first harmonic vibration of a seismic mass along a spatial direction, centrally intersecting the seismic mass and the at least one electrode, when the first constant voltage is applied between the seismic mass and the at least one electrode, a second constant voltage and a second natural frequency of a second harmonic vibration of the seismic mass along the spatial direction, centrally intersecting the seismic mass and the at least one electrode, when the second constant voltage is applied between the seismic mass and the at least one electrode.

Abstract: An operating device for a rotation-rate sensor. A mechanical amplification of a deflection oscillatory motion and/or a phase shift of the deflection oscillatory motion relative to a harmonic drive oscillation of a seismic mass can be determined using an electronic apparatus of the operating device by taking into account at least one drive frequency variable with respect to a characteristic drive frequency of the harmonic drive oscillation of the seismic mass of the rotation-rate sensor and by also taking into account at least one detection frequency variable, which is provided by the operating device itself to the operating device, with respect to a characteristic detection frequency of the deflection oscillatory motion, caused by a Coriolis force, of the seismic mass put into the harmonic drive oscillation or with respect to a difference between the characteristic drive frequency and the characteristic detection frequency.

Abstract: A system having an inertial sensor and an evaluation unit. The inertial sensor is configured to excite an oscillatory structure of the inertial sensor to execute a drive oscillation, so that an output data rate of the inertial sensor is derived as a function of a frequency of the drive oscillation. The evaluation unit has a reference clock generator and is configured to ascertain the output data rate of the inertial sensor as a function of a reference frequency of the reference clock generator and to determine the frequency and/or frequency change of the drive oscillation as a function of the ascertained output data rate. Alternatively, the inertial sensor is configured to receive a reference clock signal of the reference clock generator from the evaluation unit and to determine the frequency and/or frequency change as a function of the transmitted reference clock signal.

Abstract: A delta-sigma modulator which receives an input signal. The input signal is combined with a feedback signal and the combined signal is filtered by the delta-sigma modulator. The filtered signal is quantized, wherein the feedback signal is generated on the basis of the quantized signal. The quantized signal is output as an output signal. The input signal and/or the filtered signal and/or the feedback signal are filtered in such a way that at least one frequency in an out-of-band frequency range of the input signal is amplified in order to suppress out-of-band quantization noise at the at least one frequency.

Abstract: A micromechanical component for a yaw rate sensor. The component includes a substrate having a substrate surface, a first rotor mass developed in one piece, which is able to be set into a first torsional vibration about a first axis of rotation aligned perpendicular to the substrate surface, and at least one first component of the micromechanical component. The first rotor mass is connected to the at least one first component via at least one first spring element. The at least one first spring element extends through a lateral concavity on the first rotor mass in each case and is connected to a recessed edge region of the first rotor mass. A yaw rate sensor and a production method for a micromechanical component for a yaw rate sensor, are also described.

Abstract: A micromechanical component for a rotation rate sensor. The micromechanical component includes two rotor masses, mirror symmetrical with respect to a first plane of symmetry aligned perpendicularly to a substrate surface and passing through the center of the two rotor masses, which may be set in rotational vibrating motion about rotational axes aligned perpendicularly to the substrate surface, and four seismic masses, mirror symmetrical with respect to the first plane of symmetry, deflectable in parallel to the first plane of symmetry using the two rotor masses set in their respective rotational vibrating motion. The first rotor mass and a first pair of the four seismic masses connected thereto are mirror symmetrical to the second rotor mass and to a second pair of the four seismic masses connected thereto with respect to a second plane of symmetry aligned perpendicularly to the substrate surface and to the first plane of symmetry.

Abstract: A delta-sigma modulator which receives an input signal. The input signal is combined with a feedback signal and the combined signal is filtered by the delta-sigma modulator. The filtered signal is quantized, wherein the feedback signal is generated on the basis of the quantized signal. The quantized signal is output as an output signal. The input signal and/or the filtered signal and/or the feedback signal are filtered in such a way that at least one frequency in an out-of-band frequency range of the input signal is amplified in order to suppress out-of-band quantization noise at the at least one frequency.

Abstract: A micromechanical component for a yaw rate sensor. The component includes a substrate having a substrate surface, a first rotor mass developed in one piece, which is able to be set into a first torsional vibration about a first axis of rotation aligned perpendicular to the substrate surface, and at least one first component of the micromechanical component. The first rotor mass is connected to the at least one first component via at least one first spring element. The at least one first spring element extends through a lateral concavity on the first rotor mass in each case and is connected to a recessed edge region of the first rotor mass. A yaw rate sensor and a production method for a micromechanical component for a yaw rate sensor, are also described.

Abstract: A scanning device includes a transmitter, a receiver, and a rotor that is configured to be mounted in a rotatable manner about an axis of rotation. The transmitter is configured to at least occasionally emit electromagnetic radiation, and the receiver is configured to sense at least part of the electromagnetic radiation reflected and/or scattered by an object. The transmitter and the receiver are arranged on the rotor in an at least partially axially overlapping manner based on the axis of rotation.

Abstract: A micromechanical component includes a micromirror connected to a mounting support via at least one spring such that the micromirror is adjustable about at least one axis of rotation relative to the mounting support, where the micromirror includes a reflective surface developed at least partially on a first diaphragm surface of a mounted diaphragm of the micromirror, the diaphragm including a second diaphragm surface that faces away from the first diaphragm surface and that is mounted in air or vacuum.

Abstract: A rotation rate sensor having a first structure movable with respect to the substrate, a second structure movable with respect to the substrate and with respect to the first structure, a first drive structure for deflecting the first structure with a motion component parallel to a first axis, and a second drive structure for deflecting the second structure with a motion component parallel to the first axis. The first and second structures are excitable to oscillate in counter-phase, with motion components parallel to the first axis, the first drive structure having a first spring mounted on the substrate to counteract a pivoting of the first structure around an axis parallel to a second axis extending perpendicularly to a principal extension plane, the second drive structure having a second spring mounted on the substrate to counteracts a pivoting of the second structure around a further axis parallel to the second axis.

Abstract: A rotation rate sensor includes first, second, third and fourth structures that are each movable relative to a substrate, a drive device configured to deflect each of the first, second, third, and fourth structures essentially parallel to a drive direction and out of respective resting positions of the first, second, third, and fourth structures, such that, at a first frequency, the first and fourth structures are excitable to an oscillation that is essentially in-phase relative to each other and essentially in phase-opposition relative to the second and third structures, and, at a second frequency, the first and second structures are excitable to an oscillation that is essentially in-phase relative to each other and essentially in phase-opposition relative to the third and fourth structures.

Abstract: A micromechanical constituent includes an actuator designed to impart to a displaceable element a first displacement motion around a first rotation axis and a second displacement motion around a second rotation axis oriented tiltedly with respect to the first rotation axis, the actuator including a permanent magnet on a first spring element and a one second permanent magnet on a second spring element, where the first permanent magnet is excitable to perform a first translational motion tiltedly with respect to the first rotation axis and tiltedly with respect to the second rotation axis, and the second permanent magnet is excitable to perform a second translational motion directed oppositely to the first translational motion, causing the second displacement motion of the displaceable element around the second rotation axis.

Abstract: A rotation rate sensor including a substrate having a main plane of extension, a first rotation rate sensor structure for detecting a first rotation rate about an axis that is in parallel to a first axis extending in parallel to the main plane of extension, and a second rotation rate sensor structure for detecting a second rotation rate about an axis that is parallel to a second axis extending perpendicularly with respect to the main plane of extension. Also included is drive device for deflecting a first structure of the first rotation rate sensor structure, and a second structure of the first rotation rate sensor structure, and also for deflecting a third structure of the second rotation rate sensor structure, and a fourth structure of the second rotation rate sensor structure, in such a way that the first, second, third, and fourth structures are excitable into a mechanically coupled oscillation.

Abstract: A micromechanical component includes an adjustable part, a mounting, at least one bending actuator, and a permanent magnet. The part is positioned on the mounting so as to be adjustable relative to the mounting about a first rotation axis and about a second rotation axis inclined relative to the first axis. The actuator includes at least one movable subregion. Movement of the subregion results in a restoring force that moves the part about the first axis. The part is connected indirectly to the magnet to be adjustable about the second axis of rotation via a magnetic field built up by the magnet together with a yoke device of the component or an external yoke. A micromirror device includes the micromechanical component. A method for adjusting the part includes adjusting the part simultaneously about the first and the second axes.

Abstract: A lidar sensor for detecting an object in the surrounding area, and a method for activating the lidar sensor, the lidar sensor including: a light source for emitting electromagnetic radiation; a deflection mirror for deflecting the emitted electromagnetic radiation, as deflected emitted electromagnetic radiation, through at least one angle into the surrounding area; and an optical receiver for receiving electromagnetic radiation that has been reflected from the object. The optical receiver has an aperture region disposed on a main beam axis of the light source.

Abstract: An optical set-up for a LiDAR system for the optical detection of a field of view, in particular for an operating device, a vehicle or the like, in which an optical receiver system and an optical transmitter system are designed at least on the field of view side having essentially coaxial optical axes and have a common optical deflection system, and on the detector side an optical detector system is designed and has an arrangement for directing incident light—in particular from the field of view—directly via the optical deflection system onto a detector device.