Abstract: The disclosed techniques relate to a residual gas analyzer, in particular for analyzing a residual gas in an EUB projection exposure apparatus, including a mass spectrometer and an admission device for admitting ionized constituents of the residual gas from a vacuum environment into the mass spectrometer. The admission device includes an ion decelerator, with the ion decelerator having an adjustable deceleration voltage in order to subject the ionized constituents to selection with respect to kinetic energy before being transferred into the mass spectrometer. The disclosed techniques also relate to a projection exposure apparatus including such a residual gas analyzer, and a method for residual gas analysis.

Abstract: The invention relates to a holding device for at least one filament, comprising: at least one filament receptacle for receiving the at least one filament. The holding device is designed for the detachable attachment, in particular clamping attachment, of the at least one filament receptacle to a container of an ionization device. The invention also relates to a mass spectrometer comprising: an ionization device having a container in which an ionization space for ionizing a gas is formed, at least one holding device which is designed for the detachable attachment, in particular clamping attachment, of the at least one filament receptacle to the container, and a vacuum housing to which the holding device, in particular a base body of the holding device, is detachably connected.

Abstract: The invention relates to an ionization device with an ionization space formed in a container, an inlet system for supplying a gas to be ionized to the ionization space, an electron source having at least one filament for supply of an electron beam to the ionization space, and an outlet system for letting the ionized gas out of the ionization space. Electron optics having at least two electrodes are disposed between the filament and the ionization space.

Abstract: The invention relates to a mass spectrometer for analysing a gas by mass spectrometry, comprising: a controllable inlet system for pulsed feeding of the gas to be analysed from a process region outside the mass spectrometer into an ionisation region, an ionisation device for ionising the gas to be analysed in the ionisation region, an ion transfer device for transferring the ionised gas from a ionisation region via an ion transfer region into an analysis region, and an analyser for detecting the ionised gas in the analysis region. The invention further relates to an associated method for mass spectrometrically analysing a gas.

Abstract: The invention relates to a holding device for at least one filament, comprising: at least one filament receptacle for receiving the at least one filament. The holding device is designed for the detachable attachment, in particular clamping attachment, of the at least one filament receptacle to a container of an ionization device. The invention also relates to a mass spectrometer comprising: an ionization device having a container in which an ionization space for ionizing a gas is formed, at least one holding device which is designed for the detachable attachment, in particular clamping attachment, of the at least one filament receptacle to the container, and a vacuum housing to which the holding device, in particular a base body of the holding device, is detachably connected.

Abstract: The invention relates to an ionization device with an ionization space formed in a container, an inlet system for supplying a gas to be ionized to the ionization space, an electron source having at least one filament for supply of an electron beam to the ionization space, and an outlet system for letting the ionized gas out of the ionization space.

Abstract: The invention relates to a mass spectrometer for analysing a gas by mass spectrometry, comprising: a controllable inlet system for pulsed feeding of the gas to be analysed from a process region outside the mass spectrometer into an ionisation region, an ionisation device for ionising the gas to be analysed in the ionisation region, an ion transfer device for transferring the ionised gas from a ionisation region via an ion transfer region into an analysis region, and an analyser for detecting the ionised gas in the analysis region. The invention further relates to an associated method for mass spectrometrically analysing a gas.

Abstract: An ionization device includes: a plasma generating device for generating metastable particles and/or ions of an ionization gas in a primary plasma region; a field generating device for generating a glow discharge in a secondary plasma region; an inlet for supplying a gas to be ionized into the secondary plasma region; and a further inlet for supplying the metastable particles and/or the ions of the ionization gas into the secondary plasma region. A mass spectrometer includes such an ionization device and a detector downstream of the outlet of the ionization device for the mass-spectrometric analysis of the ionized gas.

Abstract: An ionization device includes: a plasma generating device for generating metastable particles and/or ions of an ionization gas in a primary plasma region; a field generating device for generating a glow discharge in a secondary plasma region; an inlet for supplying a gas to be ionized into the secondary plasma region; and a further inlet for supplying the metastable particles and/or the ions of the ionization gas into the secondary plasma region. A mass spectrometer includes such an ionization device and a detector downstream of the outlet of the ionization device for the mass-spectrometric analysis of the ionized gas.

Abstract: A method and a device increases (e.g., uniformly) the internal energy of ions, in order to remove water shells or adducts, to decompose clusters or molecular agglomerations, to unfold large folded ions, or to prepare ions for fragmentation with high yield. The ions can be heated at a gas pressure of a few hectopascal viscously dragged through a tube comprising on-axis RF fields with strong axial field components. The ions are introduced, as usual together with entraining gas, into a vacuum system of a mass spectrometer through a small hole or capillary, and are driven by the gas flow through the tube with the RF fields. The RF fields decelerate and re-accelerate the ions, which travel through the tube, in rapid succession mainly in forward and backward direction, thus causing high numbers of collisions with the gas molecules and heating up the ions in a uniform manner.

Abstract: The invention relates to the production of water cluster ions (“hydronium clusters”) at atmospheric pressure for the chemical ionization of analyte molecules. It is proposed that a corona discharge at the Taylor cone of an aqueous liquid, preferably pure or slightly acidified pure water, is used instead of corona discharges on metal tips, which have been the usual method up to now. The hydronium clusters of the form [H(H2O)n]+ can be produced in a discharge chamber, which is separate from the ionization chamber, and introduced into the ionization chamber through a capillary. In the ionization chamber, the hydronium clusters can be heated and reduced in size by means of electrical acceleration and gas collisions, and thus made more reactive in order that analyte molecules of low proton affinity can also be ionized.

Abstract: The invention relates to the production of water cluster ions (“hydronium clusters”) at atmospheric pressure for the chemical ionization of analyte molecules. It is proposed that a corona discharge at the Taylor cone of an aqueous liquid, preferably pure or slightly acidified pure water, is used instead of corona discharges on metal tips, which have been the usual method up to now. The hydronium clusters of the form [H(H2O)n]+ can be produced in a discharge chamber, which is separate from the ionization chamber, and introduced into the ionization chamber through a capillary. In the ionization chamber, the hydronium clusters can be heated and reduced in size by means of electrical acceleration and gas collisions, and thus made more reactive in order that analyte molecules of low proton affinity can also be ionized.

Abstract: Gaseous analyte molecules are ionized at atmospheric pressure and provided to an inlet capillary of an ion spectrometer vacuum system by passing the ions through a reaction tube that ends in a conical intermediate piece for a gastight and smooth transition into the inlet capillary. The reaction tube is shaped so that the atmospheric pressure gas stream passing therethrough form the entrance of the tune to the intermediate piece is stably laminar. Analyte molecules from gas chromatographs, spray devices or vaporization devices can be introduced into the entrance of the reaction tube and ionized within the tube by single- or multi-photon ionization, by chemical ionization, by reactant ions or by physical ionization. For single- or multi-photon ionization, a beam from a laser can be passed axially down the reaction tube. Reactant ions can be produced by any means outside of the reaction tube and mixed with the analyte molecules within the tube.

Abstract: The invention relates to a method for the mass spectrometry examination of at least one analyte, wherein an analyte to be examined is photoionized and the mass of the ions produced is determined in a mass spectrometer. The analyte to be examined is ionized at normal atmospheric ambient pressure by means of laser light using multiphoton ionization, especially resonant multiphoton ionization. The invention also relates to a device which comprises an ionization chamber in which an analyte to be examined is ionized at normal atmospheric ambient pressure using resonant multiphoton ionization and is transferred into a mass spectrometer. Said device can be used as an interface between a device for the chromatographic or electrophoretic separation of analytes and a mass spectrometer.

Abstract: A technique employing volume conductive electrodes for the generation of linear or non-linear electric fields is provided for devices used in charged ion optics. A hollow cylinder of a conductive polymer, which is loaded with conductive carbon particles or inherently conductive, and which is used to improve the performance of a dual stage gridless reflectron. Instrumental resolution measurements comparing a conventional discrete ring reflectron with a hybrid polymeric/discrete ring validate the design.

Abstract: A technique employing volume conductive electrodes for the generation of linear or non-linear electric fields is provided for devices used in charged ion optics. A hollow cylinder of a conductive polymer, which is loaded with conductive carbon particles or inherently conductive, and which is used to improve the performance of a dual stage gridless reflectron. Instrumental resolution measurements comparing a conventional discrete ring reflectron with a hybrid polymeric/discrete ring validate the design.