Patents by Inventor Thorsten Kril
Thorsten Kril has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11892821Abstract: An electronic device manufacturing system that includes a process tool and a tool server coupled to the process tool and comprising a communication node and an evaluation system. The communication node is configured to obtain one or more attributes from an evaluation system and provide a monitoring device comprising a data collection plan that is based on the one or more attributes. The communication node is further configured to register the monitoring device with a process tool. The communication node is further configured to receive, from the process tool, data based on the data collection plan and send the received data to the evaluation system.Type: GrantFiled: March 15, 2022Date of Patent: February 6, 2024Assignee: Applied Materials, Inc.Inventors: Michael Howells, Thorsten Kril, Hemanth Konanur Nagendra, Jatinder Sasan
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Publication number: 20230297072Abstract: An electronic device manufacturing system that includes a process tool and a tool server coupled to the process tool and comprising a communication node and an evaluation system. The communication node is configured to obtain one or more attributes from an evaluation system and provide a monitoring device comprising a data collection plan that is based on the one or more attributes. The communication node is further configured to register the monitoring device with a process tool. The communication node is further configured to receive, from the process tool, data based on the data collection plan and send the received data to the evaluation system.Type: ApplicationFiled: March 15, 2022Publication date: September 21, 2023Inventors: Michael Howells, Thorsten Kril, Hemanth Konanur Nagendra, Jatinder Sasan
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Patent number: 11714430Abstract: A method includes identifying time values for a length of time to carry out process fluid delivery within multiple processing chambers that concurrently process multiple substrates; translating each time value to a recipe parameter for execution of an operation of a processing recipe; and causing the operation to be performed using each recipe parameter as a control value to control valves of a fluid panel of the multiple processing chambers. For each processing chamber of the multiple processing chambers, selectively controlling process fluid flow to the process chamber for a first period of time corresponding to a time value of the set of time values and to a divert foreline of the process chamber for a second period of time.Type: GrantFiled: September 29, 2022Date of Patent: August 1, 2023Assignee: Applied Materials, Inc.Inventors: Mitesh Sanghvi, Venkatanarayana Shankaramurthy, Peter Standish, Anton Baryshnikov, Thorsten Kril, Chahal Neema, Vishal Suresh Jamakhandi, Abhijit Ashok Kangude
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Publication number: 20230021640Abstract: A method includes identifying time values for a length of time to carry out process fluid delivery within multiple processing chambers that concurrently process multiple substrates; translating each time value to a recipe parameter for execution of an operation of a processing recipe; and causing the operation to be performed using each recipe parameter as a control value to control valves of a fluid panel of the multiple processing chambers. For each processing chamber of the multiple processing chambers, selectively controlling process fluid flow to the process chamber for a first period of time corresponding to a time value of the set of time values and to a divert foreline of the process chamber for a second period of time.Type: ApplicationFiled: September 29, 2022Publication date: January 26, 2023Inventors: Mitesh Sanghvi, Venkatanarayana Shankaramurthy, Peter Standish, Anton Baryshnikov, Thorsten Kril, Chahal Neema, Vishal Suresh Jamakhandi, Abhijit Ashok Kangude
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Patent number: 11487304Abstract: A method includes identifying time values for a length of time to carry out process fluid delivery within multiple processing chambers that concurrently process multiple substrates; translating each time value to a recipe parameter for execution of an operation of a processing recipe; and causing the operation to be performed using each recipe parameter as a control value to control valves of a fluid panel of the multiple processing chambers. For each processing chamber of the multiple processing chambers: causing the process fluid to flow to the processing chamber for a first period of time corresponding to a first time value; and causing the process fluid to flow to a divert foreline of the processing chamber for a second period of time, the second period of time being based on a timestep of the operation and the time value.Type: GrantFiled: January 8, 2021Date of Patent: November 1, 2022Assignee: Applied Materials, Inc.Inventors: Mitesh Sanghvi, Venkatanarayana Shankaramurthy, Peter Standish, Anton Baryshnikov, Thorsten Kril, Chahal Neema, Vishal Suresh Jamakhandi, Abhijit Ashok Kangude
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Publication number: 20220221880Abstract: A method includes identifying time values for a length of time to carry out process fluid delivery within multiple processing chambers that concurrently process multiple substrates; translating each time value to a recipe parameter for execution of an operation of a processing recipe; and causing the operation to be performed using each recipe parameter as a control value to control valves of a fluid panel of the multiple processing chambers. For each processing chamber of the multiple processing chambers: causing the process fluid to flow to the processing chamber for a first period of time corresponding to a first time value; and causing the process fluid to flow to a divert foreline of the processing chamber for a second period of time, the second period of time being based on a timestep of the operation and the time value.Type: ApplicationFiled: January 8, 2021Publication date: July 14, 2022Inventors: Mitesh Sanghvi, Venkatanarayana Shankaramurthy, Peter Standish, Anton Baryshnikov, Thorsten Kril, Chahal Neema, Vishal Suresh Jamakhandi, Abhijit Ashok Kangude
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Patent number: 10409272Abstract: A method and apparatus for automatically providing a virtual sensor have been described. In one embodiment, a method for automatically providing a virtual sensor includes receiving a plurality of virtual sensor templates from a server. The method further includes selecting a virtual sensor template from the plurality of virtual sensor templates. The selected virtual sensor template has an algorithm to provide a desired functionality. The method further includes selecting at least one parameter to configure the selected virtual sensor template. The method further includes automatically creating a virtual sensor associated with the selected virtual sensor template.Type: GrantFiled: July 22, 2014Date of Patent: September 10, 2019Assignee: APPLIED MATERIALS, INC.Inventors: Natalia Kroupnova, Aleksey Yanovich, Thorsten Kril, Mikhail B. Kozine
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Patent number: 9910430Abstract: A server computer system creates a reference fingerprint for a first tool running a recipe. The server computer system uses reference data that pertains to the first tool performing within parameters to create the reference fingerprint. The reference fingerprint includes a target baseline and allowable ranges based on the target baseline. The server computer system determines whether sample data that is associated with a second tool running the recipe is performing within the parameters based on a comparison of the sample data to the reference fingerprint. The second tool can be the first tool or another tool of a same type as the first tool. The server computer system provides a classification of the second tool to at least one of a system or a user based on the comparison of the sample data to the reference fingerprint. The classification indicates whether the second tool is performing within the parameters.Type: GrantFiled: August 23, 2013Date of Patent: March 6, 2018Assignee: APPLIED MATERIALS, INC.Inventors: Dermot Cantwell, Thorsten Kril, Aleksey Yanovich
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Publication number: 20150057788Abstract: A server computer system creates a reference fingerprint for a first tool running a recipe. The server computer system uses reference data that pertains to the first tool performing within parameters to create the reference fingerprint. The reference fingerprint includes a target baseline and allowable ranges based on the target baseline. The server computer system determines whether sample data that is associated with a second tool running the recipe is performing within the parameters based on a comparison of the sample data to the reference fingerprint. The second tool can be the first tool or another tool of a same type as the first tool. The server computer system provides a classification of the second tool to at least one of a system or a user based on the comparison of the sample data to the reference fingerprint. The classification indicates whether the second tool is performing within the parameters.Type: ApplicationFiled: August 23, 2013Publication date: February 26, 2015Applicant: Applied Materials, Inc.Inventors: Dermot Cantwell, Thorsten Kril, Aleksey Yanovich
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Publication number: 20140336966Abstract: A method and apparatus for automatically providing a virtual sensor have been described. In one embodiment, a method for automatically providing a virtual sensor includes receiving a plurality of virtual sensor templates from a server. The method further includes selecting a virtual sensor template from the plurality of virtual sensor templates. The selected virtual sensor template has an algorithm to provide a desired functionality. The method further includes selecting at least one parameter to configure the selected virtual sensor template. The method further includes automatically creating a virtual sensor associated with the selected virtual sensor template.Type: ApplicationFiled: July 22, 2014Publication date: November 13, 2014Inventors: Natalia Kroupnova, Aleksey Yanovich, Thorsten Kril, Mikhail B. Kozine
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Patent number: 8812261Abstract: A method and apparatus for automatically providing a virtual sensor have been described. In one embodiment, a method for automatically providing a virtual sensor includes receiving a plurality of virtual sensor templates from a server. The method further includes selecting a virtual sensor template from the plurality of virtual sensor templates. The selected virtual sensor template has an algorithm to provide a desired functionality. The method further includes selecting at least one parameter to configure the selected virtual sensor template. The method further includes automatically creating a virtual sensor associated with the selected virtual sensor template.Type: GrantFiled: February 12, 2008Date of Patent: August 19, 2014Assignee: Applied Materials, Inc.Inventors: Natalia Kroupnova, Aleksey Yanovich, Thorsten Kril, Mikhail B. Kozine
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Patent number: 8572155Abstract: A method and apparatus for providing a virtual sensor in real-time have been described. In one embodiment, a method to provide a virtual sensor in real-time includes identifying data indicating desired functionality. The method further includes executing the virtual sensor in real-time based on the identified data to generate an output of the virtual sensor with the output being used by at least one data analysis module in real-time for statistical process monitoring.Type: GrantFiled: February 12, 2008Date of Patent: October 29, 2013Assignee: Applied Materials, Inc.Inventors: Aleksey Yanovich, Thorsten Kril, Natalia Kroupnova
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Patent number: 8473247Abstract: Methods for monitoring processing equipment are provided herein. In some embodiments, a method for monitoring processing equipment when in an idle state for a period of idle time may include selecting a test from a list of a plurality of tests to perform on the processing equipment when the processing equipment is in the idle state, wherein the test has a total run time; starting the selected test; comparing a remaining idle time of the period of idle time to a remaining run time of the total run time as the selected test is performed; and determining whether to end the selected test prior to completing the total run time in response to the comparison.Type: GrantFiled: October 29, 2010Date of Patent: June 25, 2013Assignee: Applied Materials, Inc.Inventors: James P. Cruse, Dermot Cantwell, Michael R. Rice, Thorsten Kril, Charles Hardy
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Publication number: 20110270574Abstract: Methods for monitoring processing equipment are provided herein. In some embodiments, a method for monitoring processing equipment when in an idle state for a period of idle time may include selecting a test from a list of a plurality of tests to perform on the processing equipment when the processing equipment is in the idle state, wherein the test has a total run time; starting the selected test; comparing a remaining idle time of the period of idle time to a remaining run time of the total run time as the selected test is performed; and determining whether to end the selected test prior to completing the total run time in response to the comparison.Type: ApplicationFiled: October 29, 2010Publication date: November 3, 2011Applicant: APPLIED MATERIALS, INC.Inventors: JAMES P. CRUSE, DERMOT CANTWELL, MICHAEL R. RICE, THORSTEN KRIL, CHARLES HARDY
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Publication number: 20090055692Abstract: A method and apparatus for automatically providing a virtual sensor have been described. In one embodiment, a method for automatically providing a virtual sensor includes receiving a plurality of virtual sensor templates from a server. The method further includes selecting a virtual sensor template from the plurality of virtual sensor templates. The selected virtual sensor template has an algorithm to provide a desired functionality. The method further includes selecting at least one parameter to configure the selected virtual sensor template. The method further includes automatically creating a virtual sensor associated with the selected virtual sensor template.Type: ApplicationFiled: February 12, 2008Publication date: February 26, 2009Inventors: Natalia Kroupnova, Aleksey Yanovich, Thorsten Kril, Mikhail B. Kozine
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Publication number: 20090055126Abstract: A method and apparatus for providing a virtual sensor in real-time have been described. In one embodiment, a method to provide a virtual sensor in real-time includes identifying data indicating desired functionality. The method further includes executing the virtual sensor in real-time based on the identified data to generate an output of the virtual sensor with the output being used by at least one data analysis module in real-time for statistical process monitoring.Type: ApplicationFiled: February 12, 2008Publication date: February 26, 2009Inventors: Aleksey Yanovich, Thorsten Kril, Natalie Kroupnova