Patents by Inventor Thorsten Schepers

Thorsten Schepers has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD AND APPARATUS FOR MATCHING TOOLS BASED ON TIME TRACE DATA
    Publication number: 20140100806
    Abstract: A method includes receiving tool trace data from a group of tools of the same type in a computing device. A tool fingerprint is generated for each tool using the tool trace data for the tools in group other than the tool for which the tool fingerprint is generated in the computing device. A tool score is generated for each tool based on its tool trace data and its associated fingerprint in the computing device. A fault condition with at least a selected tool is identified based on the tool scores in the computing device.
    Type: Application
    Filed: October 4, 2012
    Publication date: April 10, 2014
    Applicant: GLOBALFOUNDRIES INC.
    Inventors: Richard P. Good, Thorsten Schepers
  • UV irradiance monitoring in semiconductor processing using a temperature dependent signal
    Patent number: 8518720
    Abstract: In a UV process tool for semiconductor processing, a temperature-dependent signal may be used as a monitor signal for determining the momentary irradiance of the UV radiation source. Consequently, a fast and reliable monitoring and/or controlling of the irradiance of UV process tools may be accomplished.
    Type: Grant
    Filed: August 12, 2010
    Date of Patent: August 27, 2013
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Ulrich Mayer, Thorsten Schepers
  • UV IRRADIANCE MONITORING IN SEMICONDUCTOR PROCESSING USING A TEMPERATURE DEPENDENT SIGNAL
    Publication number: 20110053294
    Abstract: In a UV process tool for semiconductor processing, a temperature-dependent signal may be used as a monitor signal for determining the momentary irradiance of the UV radiation source. Consequently, a fast and reliable monitoring and/or controlling of the irradiance of UV process tools may be accomplished.
    Type: Application
    Filed: August 12, 2010
    Publication date: March 3, 2011
    Inventors: Ulrich Mayer, Thorsten Schepers