Patents by Inventor Thuy Do

Thuy Do has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Contour Self-Alignment For Optical Proximity Correction Model Calibration
    Publication number: 20110202893
    Abstract: Techniques for model calibration and alignment of measurement contours of printed layout features with simulation contours obtained with a model are disclosed. With various implementations of the invention, contour point errors are determined. Based on the contour point errors and a cost function, values of alignment parameters may be determined. The values of alignment parameters may be used to realign the measurement contours for model calibration. The alignment may be conducted concurrently with model calibration.
    Type: Application
    Filed: February 16, 2011
    Publication date: August 18, 2011
    Inventors: Ir Kusnadi, Thuy Do, Yuri Granik, John L. Sturtevant