Patents by Inventor Thy Yam

Thy Yam has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for forming substrate surfaces with exposed crystal lattice using accelerated neutral atom beam
    Patent number: 11735432
    Abstract: A method for removing amorphous regions from a surface of a crystal substrate uses an accelerated neutral beam including reactive gas species for removing or reactively modifying material surfaces without sputtering. Accelerated neutral atom beam enabled surface reactions remove surface contaminants from substrate surfaces to create an interface region with exposed crystal lattice in preparation for next phase processing.
    Type: Grant
    Filed: April 8, 2021
    Date of Patent: August 22, 2023
    Assignee: EXOGENESIS CORPORATION
    Inventors: Sean R. Kirkpatrick, Kiet A. Chau, Thy Yam, Michael J. Walsh
  • METHOD AND APPARATUS FOR FORMING SUBSTRATE SURFACES WITH EXPOSED CRYSTAL LATTICE USING ACCELERATED NEUTRAL ATOM BEAM
    Publication number: 20210225661
    Abstract: A method for removing amorphous regions from a surface of a crystal substrate uses an accelerated neutral beam including reactive gas species for removing or reactively modifying material surfaces without sputtering. Accelerated neutral atom beam enabled surface reactions remove surface contaminants from substrate surfaces to create an interface region with exposed crystal lattice in preparation for next phase processing.
    Type: Application
    Filed: April 8, 2021
    Publication date: July 22, 2021
    Applicant: Exogenesis Corporation
    Inventors: Sean R. Kirkpatrick, Kiet A. Chau, Thy Yam, Michael J. Walsh