Abstract: Sensor equipment includes: a sensor device having a sensing portion; and an electric connection portion coated with an electric insulation member. The electric connection portion electrically connects an external circuit and the sensor device. The electric insulation member is a thin film disposed on the electric connection portion. In the sensor equipment, the insulation member is made of the deposition film, which is not deteriorated with time. Therefore, the insulation member does not flow out from the connection portion. Accordingly, detection sensitivity of the sensor equipment is prevented from reducing.

Abstract: An infrared sensor is composed of an optical filter plate, an infrared-detecting plate and a supporting member positioned between both plates. A detecting element for detecting infrared rays passing through the optical filter plate is formed on a front surface of the infrared-detecting plate facing the optical filter plate. The supporting member is positioned to surround the detector element on the infrared-detecting plate to firmly connect both plates and to form a predetermined gap between both plates. The supporting member may be composed of a number of discrete dots positioned to surround the detector element or of a continuous ring surrounding the detector element.

Abstract: A sensor device is composed of a sensor element having a sensing portion, and a signal-outputting portion mounted on a substrate. The sensor element is also mounted on the substrate via a resilient material. The sensor element is electrically connected to the signal-outputting portion through a bonding wire. The work consisting of the sensor element, signal-outputting portion and the substrate is held in a molding die, and the work is molded with an insulating material, while keeping the sensing portion exposed outside of the insulating material. A depressed portion of the molding die, in which the sensor element is accommodated in the molding process, has substantially no clearance relative to the sensor element, and the sensor element is led to the depressed portion by resiliency of the material bonding the sensor element to the substrate. Therefore, no burs are formed on the sides of the sensor element in the molding process.

Abstract: In a thermal-type flow rate sensor, a mold material is formed to integrally cover a predetermined range including a circuit chip, connecting parts of connecting wires with a flow rate detecting chip and the circuit chip, and connecting parts of connecting wires with the circuit chip and a lead portion, to expose a part of the flow rate detecting chip to a measured fluid. The flow rate detecting chip is located in a groove portion of a support member to have a clearance with the groove portion and to form a cavity part inside a thin wall portion of the detecting chip. The cavity part communicates with an outside through a communicating portion that includes the clearance, and the clearance is blocked by a filler at least at a portion positioned in the predetermined range. Therefore, the filler prevents the mold material from entering the clearance in the mold forming.

Abstract: A pressure sensor includes a sensor chip having a pressure receiving surface formed on one surface of the sensor chip, a first case having one end portion at which the sensor chip is provided, a second case attached to the one end portion of the first case to cover the sensor chip. The second case is provided with a pressure introducing passage for introducing the pressure to the sensor chip, and a wiring board is provided at the one end portion of the first case to have a surface facing toward the pressure introducing passage. In the pressure sensor, the sensor chip is electrically connected with the surface of the wiring board through bumps by a flip-chip bonding such that the pressure receiving surface faces the surface of the wiring board, and an insulating member is provided to seal a connection portion of the bumps.

Abstract: An infrared sensor is composed of an optical filter plate, an infrared-detecting plate and a supporting member positioned between both plates. A detecting element for detecting infrared rays passing through the optical filter plate is formed on a front surface of the infrared-detecting plate facing the optical filter plate. The supporting member is positioned to surround the detector element on the infrared-detecting plate to firmly connect both plates and to form a predetermined gap between both plates. The supporting member may be composed of a number of discrete dots positioned to surround the detector element or of a continuous ring surrounding the detector element.

Abstract: A pressure sensor includes a sensor chip having a pressure receiving surface formed on one surface of the sensor chip, a first case having one end portion at which the sensor chip is provided, a second case attached to the one end portion of the first case to cover the sensor chip. The second case is provided with a pressure introducing passage for introducing the pressure to the sensor chip, and a wiring board is provided at the one end portion of the first case to have a surface facing toward the pressure introducing passage. In the pressure sensor, the sensor chip is electrically connected with the surface of the wiring board through bumps by a flip-chip bonding such that the pressure receiving surface faces the surface of the wiring board, and an insulating member is provided to seal a connection portion of the bumps.

Abstract: In a thermal-type flow rate sensor, a mold material is formed to integrally cover a predetermined range including a circuit chip, connecting parts of connecting wires with a flow rate detecting chip and the circuit chip, and connecting parts of connecting wires with the circuit chip and a lead portion, to expose a part of the flow rate detecting chip to a measured fluid. The flow rate detecting chip is located in a groove portion of a support member to have a clearance with the groove portion and to form a cavity part inside a thin wall portion of the detecting chip. The cavity part communicates with an outside through a communicating portion that includes the clearance, and the clearance is blocked by a filler at least at a portion positioned in the predetermined range. Therefore, the filler prevents the mold material from entering the clearance in the mold forming.

Abstract: Sensor equipment includes: a sensor device having a sensing portion; and an electric connection portion coated with an electric insulation member. The electric connection portion electrically connects an external circuit and the sensor device. The electric insulation member is a thin film disposed on the electric connection portion. In the sensor equipment, the insulation member is made of the deposition film, which is not deteriorated with time. Therefore, the insulation member does not flow out from the connection portion. Accordingly, detection sensitivity of the sensor equipment is prevented from reducing.

Abstract: A sensor device is composed of a sensor element having a sensing portion, and a signal-outputting portion mounted on a substrate. The sensor element is also mounted on the substrate via a resilient material. The sensor element is electrically connected to the signal-outputting portion through a bonding wire. The work consisting of the sensor element, signal-outputting portion and the substrate is held in a molding die, and the work is molded with an insulating material, while keeping the sensing portion exposed outside of the insulating material. A depressed portion of the molding die, in which the sensor element is accommodated in the molding process, has substantially no clearance relative to the sensor element, and the sensor element is led to the depressed portion by resiliency of the material bonding the sensor element to the substrate. Therefore, no burs are formed on the sides of the sensor element in the molding process.

Abstract: When a compressed air is led into a reference pressure chamber along with a boundary between a resin housing and a terminal, such compressed air may cause a wire breaking. A barrier wall for blocking the compressed air from penetrating toward the wire is disposed. The reference pressure chamber is divided into a main chamber and a subchamber by the barrier wall. Since the barrier wall blocks the compressed air, the compressed air can not reach a silicon gel in the main chamber. Therefore, the wire breaking caused by the compressed air when connecting a connector therewith can be precluded.

Abstract: A pressure sensor has a resin housing containing a pressure sensor positioned between a reference pressure chamber and a pressure to be measured. A terminal extends through the housing toward the sensor. A wire connects the terminal to the sensor. When a connector is connected to the terminal, it may compress air around the terminal. The compressed air may travel along the terminal and break the wire connected to the sensor. To prevent such breakage, a barrier wall is provided to block the compressed air from penetrating toward the wire. The reference pressure chamber is divided into a main chamber and a subchamber by the barrier wall. Since the barrier wall blocks the compressed air, the compressed air can not reach a silicon gel on the sensor and the wire in the main chamber. Therefore, the wire is protected.

Abstract: When an acceleration sensor is used, it is attached to a measured object to detect an acceleration applied to the object. The acceleration sensor includes a package having at least one chamber. A sensor element is disposed in the chamber and has a portion which vibrates in response to the acceleration. Damping liquid is sealed within the package and has a quantity which allows the sensor element to be submerged in the damping liquid and which allows a predetermined quantity of gas to remain in the package. The gas absorbs a thermally-induced volume change of the damping liquid. In the absence of the acceleration, a gas bubble is prevented from separating from the gas. In addition, the gas bubble is prevented from staying in the chamber.

Abstract: An apparatus for optically detecting the attachment state of extraneous matters to a translucent shield member. The optically detecting apparatus comprises a light-emitting unit having a plurality of light-emitting elements each emitting a light ray toward the translucent shield member, a photoelectric transducer unit having a plurality of transducer elements each receiving each of the light rays reflected on the translucent shield member, and a data processing unit coupled to the transducer unit. The transducer unit generates detection signals corresponding to the quantities of the received light rays and the data processing unit successively compares the level of each of the detection signals with a predetermined level to produce binary signals in accordance with the results of the comparison so that a binary signal pattern is defined at the respective transducer elements.

Abstract: A semiconductor accelerometer includes a package containing damping liquid. A base is fixedly disposed within the package. A semiconductor plate is disposed within the package and is supported on the base. The semiconductor plate has a movable free end and a deformable diaphragm. A semiconductor strain gauge is associated with the diaphragm and deforms in accordance with deformation of the diaphragm. The base has a first surface opposing the semiconductor plate free end. The first surface of the base has a recess for limiting movement of the semiconductor plate free end. The recess extends to and opens at a second surface of the base which differs from the first surface.

Abstract: A control system for an engine has a temperature sensitive element as part of a device for measuring the air flow in an air intake manifold to the engine. Further, a first pulse signal is generated, corresponding to the rotation of the engine, for controlling the setting of a flip-flop. A transistor is conducted in the set state of the flip-flop to supply a heating electric current to the element. The element supplied with the current is raised to the temperature that corresponds to the air flow in the manifold. When the temperature of the element is raised until the specified temperature difference to the air temperature (measured by a sub temperature sensitive element) is set, the temperature difference is detected by a comparator, and the flip-flop is reset by the detection signal.

Abstract: In an apparatus for controlling an engine, as an air flow sensor for measuring intake air flow quantity, a heater resistor having temperature-resistance characteristic and a temperature sensitive resistor for sensing air temperature are provided in an intake passage, and heating electric power is supplied to the heater resistor in response to a start signal generated periodically. The heating electric power is cut off when the temperature of the heater resistor is raised to a specified reference temperature predetermined in accordance with the air temperature, so that an output signal indicative of the time width in which the heating electric power is supplied is applied to an electronic control unit to measure air flow quantity therefrom.

Abstract: A heater, which comprises an element whose resistance varies with changes in temperature, and a temperature element are provided in the air intake pipe of an engine. This heater and temperature element together with resistors form a bridge circuit to which heating power is supplied via a transistor. An engine control unit generates start signals Tin simultaneously with the rotation of the engine. A flip-flop circuit is set by these start signals and, when set, the transistor is turned on and the heating power rises. The output signal from the bridge circuit is supplied to a comparator and the output signal of the comparator resets the flip-flop circuit, which outputs a pulse-shaped signal representing the airflow quantity as a length of time. This pulse-shaped time signal is sent via a constant current circuit to another comparator, where it is compared with a reference voltage and the output signal from the comparator is supplied together with the above time signal to an exclusive OR circuit.

Abstract: A heat generating element having a thermal characteristic such that its resistance varies in response to changes in temperature is provided in the intake pipe of an engine. A heating power, the voltage of which is set by a reference voltage source, is supplied to the heat generating element via a transistor. The supply of this heating power is controlled by a start pulse signal periodically generated by a set flip-flop circuit when the ignition switch is on. When the heat generating element reaches a predetermined temperature, the supply is cut off by the flip-flop circuit. A measurement signal having a pulse width corresponding to the time period of heating power supply is generated from the flip-flop circuit. The opening of the ignition switch is detected and a one-shot multivibrator is driven to produce a burn-off signal having a pulse width to which the burn-off period corresponds.

Abstract: An air flowrate measuring apparatus with a heat wire measures the flow rate of the air flowing through the intake pipe of an engine. The apparatus has a temperature sensitive element which has a specific temperature-resistance characteristic and is disposed in the intake pipe. Constant heating voltage is applied to this element in response to a start signal, thus heating the element. When the temperature of the element rises to a specified value, the application of the voltage is stopped. At the same time, a pulse signal whose width corresponds to the period of applying the voltage is generated. The signal is supplied to an interface circuit through a drive circuit driven by a reference voltage which has been also used to control the heating voltage. The interface circuit comprises two wave-shaping circuits. The first wave-shaping circuit has a filter means of a small integration time constant.