Abstract: The present invention relates to a microcrystalline silicon thin film solar cell and the manufacturing method thereof, using which not only the crystallinity of a microcrystalline silicon thin film that is to be formed by the manufacturing method can be controlled and adjusted at will and the defects in the microcrystalline silicon thin film can be fixed, but also the device characteristic degradation due to chamber contamination happening in the manufacturing process, such as plasma enhanced chemical vapor deposition (PECVD), can be eliminated effectively.

Abstract: The present invention relates to a microcrystalline silicon thin film solar cell and the manufacturing method thereof, using which not only the crystallinity of a microcrystalline silicon thin film that is to be formed by the manufacturing method can be controlled and adjusted at will and the defects in the microcrystalline silicon thin film can be fixed, but also the device characteristic degradation due to chamber contamination happening in the manufacturing process, such as plasma enhanced chemical vapor deposition (PECVD), can be eliminated effectively.

Abstract: A practical product combining a thin film solar cell component with a residential environment is provided. Being flexible and easy to manufacture on a plane material, a silicon thin film solar cell is combined with a shutter used in residential buildings, thereby extending shutter functions. This module integrates energy saving, power generation and elegant appearance by bringing in a flexible and colored solar cell module that is light and thin and can generate power indoors and outdoors. As buildings are becoming higher nowadays, the area exposed to sunlight increases. Solar shutters have great power generation efficiency potential if used a building. The solar shutters can save energy and reduce CO2 emission when combined with electric products and provide electricity in emergency when combined with a storage device. The thin film solar cell provides components of many colors for customers, thereby providing options for the appearance of the building.