Abstract: A method for producing a thin film transistor includes forming a transistor prototype on a substrate. The transistor prototype includes two transparent electrodes adapted to form a source and a drain of a thin film transistor. Next, the two transparent electrodes of the transistor prototype are exposed in an environment full of a plasma. The plasma conducts a surface treatment on the two transparent electrodes of the transistor prototype to form the thin film transistor. The method can solve the problem of excessive contact resistance of the transparent conductive films of conventional thin film transistors.

Abstract: A method for producing a thin film transistor includes forming a transistor prototype on a substrate. The transistor prototype includes two transparent electrodes adapted to form a source and a drain of a thin film transistor. Next, the two transparent electrodes of the transistor prototype are exposed in an environment full of a plasma. The plasma conducts a surface treatment on the two transparent electrodes of the transistor prototype to form the thin film transistor. The method can solve the problem of excessive contact resistance of the transparent conductive films of conventional thin film transistors.

Abstract: A method for producing a thin film transistor includes forming a transistor prototype on a substrate, with the transistor prototype including a face having a to-be-treated portion. The to-be-treated portion of the transistor prototype is exposed in an environment full of a supercritical fluid. The supercritical fluid conducts a surface treatment on the to-be-treated portion of the transistor prototype to form a thin film transistor. The method can solve the problem of too many defects of the thin film transistor resulting from a low-temperature process.

Abstract: A thin film transistor is disclosed in the present invention, including a substrate, a gate, an insulating layer, a source, a drain and an active layer. The gate is arranged on the substrate. The insulating layer is arranged on the gate. The source and the drain are arranged on the insulating layer. The active layer is arranged between the source and the drain, and is formed by a bottom layer, an intermediate layer and a top layer stacked together on the insulating layer. The conductivity of the intermediate layer is higher than that of the bottom layer, and the conductivity of the bottom layer is higher than that of the top layer. As such, the disadvantage of low carrier mobility as commonly seen in the conventional thin film transistor is overcome.