Abstract: A flow guide apparatus includes a columnar flow guide portion, a plurality of connection portions and a loop portion. The columnar flow guide portion includes a first surface and a second surface that are perpendicular to a thickness direction thereof, and a blind hole formed in the second surface. A center line of the columnar flow guide portion is parallel to the thickness direction thereof. The plurality of connection portions are arranged at intervals and are at least connected with an edge of the second surface of the columnar flow guide portion. The loop portion is connected with the plurality of connection portions, and is farther away from the columnar flow guide portion than the plurality of connection portions.

Abstract: According to an embodiment of the invention, a coating head of a mist coating film formation apparatus including a main body is provided. The main body includes a top plate in which a supply port capable of supplying one of a cleaning liquid or a mist of a source material solution is provided, a bottom plate provided below the top plate in a vertical direction, and a sidewall provided between the top plate and the bottom plate; and the sidewall includes an upper end and a lower end connected respectively to the top plate and the bottom plate and forms an interior space with the top plate and the bottom plate. The sidewall includes a slit spraying the mist externally from the interior space, and a recovery port capable of recovering the supplied cleaning liquid or a mist coalescing in the interior space. The bottom plate includes a slope having a height becoming lower from an inner perimeter of the sidewall toward the recovery port.

Abstract: Provided is a technology for evaluating a property of a pattern formed inside a sample from two-dimensional information of the sample. A pattern evaluation system of the present disclosure includes a computer subsystem that executes a process of evaluating a property of a pattern by reading a program from a memory that stores the program for evaluating the property of the pattern formed inside a sample. The computer subsystem executes a process of acquiring an image of the sample; a process of extracting a signal waveform from the image; a process of calculating a feature amount in a predetermined region of the signal waveform; a process of comparing the feature amount with a reference value of the feature amount; and a process of evaluating the property of the pattern based upon a comparison result in the comparison process.

Abstract: A flow guide apparatus includes a columnar flow guide portion, a plurality of connection portions and a loop portion. The columnar flow guide portion includes a first surface and a second surface that are perpendicular to a thickness direction thereof, and a blind hole formed in the second surface. A center line of the columnar flow guide portion is parallel to the thickness direction thereof. The plurality of connection portions are arranged at intervals and are at least connected with an edge of the second surface of the columnar flow guide portion. The loop portion is connected with the plurality of connection portions, and is farther away from the columnar flow guide portion than the plurality of connection portions.

Abstract: Provided is a technology for evaluating a property of a pattern formed inside a sample from two-dimensional information of the sample. A pattern evaluation system of the present disclosure includes a computer subsystem that executes a process of evaluating a property of a pattern by reading a program from a memory that stores the program for evaluating the property of the pattern formed inside a sample. The computer subsystem executes a process of acquiring an image of the sample; a process of extracting a signal waveform from the image; a process of calculating a feature amount in a predetermined region of the signal waveform; a process of comparing the feature amount with a reference value of the feature amount; and a process of evaluating the property of the pattern based upon a comparison result in the comparison process.

Abstract: According to an embodiment of the invention, a coating head of a mist coating film formation apparatus including a main body is provided. The main body includes a top plate in which a supply port capable of supplying one of a cleaning liquid or a mist of a source material solution is provided, a bottom plate provided below the top plate in a vertical direction, and a sidewall provided between the top plate and the bottom plate; and the sidewall includes an upper end and a lower end connected respectively to the top plate and the bottom plate and forms an interior space with the top plate and the bottom plate. The sidewall includes a slit spraying the mist externally from the interior space, and a recovery port capable of recovering the supplied cleaning liquid or a mist coalescing in the interior space. The bottom plate includes a slope having a height becoming lower from an inner perimeter of the sidewall toward the recovery port.

Abstract: A raw material solution mist-forming mechanism forms a mist from a raw material solution, which is a nanoparticle dispersion or a nanofiber dispersion, and obtains a raw material solution mist. A mist coating mechanism coats the raw material solution mist to a surface of a substrate to form an extremely thin liquid film of the raw material solution on the substrate surface. A baking and drying mechanism bakes and dries, on a hot plate, the substrate on the surface of which the extremely thin liquid film of the raw material solution is formed and evaporates a solvent in the extremely thin liquid film of the raw material solution to form, on the substrate surface, a thin film containing, as a constituent material, a nanoparticle raw material or a nanofiber raw material contained in the extremely thin liquid film of the raw material solution.

Abstract: In the present invention, a coating solution atomization mechanism implements a coating solution mist generating process for generating a coating solution mist by atomizing a coating solution using an ultrasonic transducer generating ultrasonic waves. A mist coating mechanism implements a coating solution mist coating process for coating the coating solution mist to the surface of a substrate by supplying the coating solution mist from a mist coating head to the surface of the substrate mounted on a moving stage. A baking and drying mechanism implements a baking and drying process for baking and drying, on a hot plate, the substrate to the surface of which the coating solution mist is coated to evaporate a solvent of a liquid film formed of the coating solution mist, thereby forming a thin film on the surface of the substrate.

Abstract: A network management node may manage a network of base stations and wireless transmit/receive units (WTRUs) that operate using diverse radio access technologies. The network management node may communicate with other network management nodes to manage spectrum usage across their respective managed networks. The network management node may acts as a proxy for cellular-capable WTRUs that operate within the managed networks. The network management node may perform handovers of Peer-to-Peer (P2P) groups that operate within the managed networks. The WTRUs may include WTRUs that operate at Very High Frequency (VHF) or Ultra High Frequency (UHF) spectrum (“white space”) frequencies.