Abstract: Multi-layer metal or pseudometallic materials having engineered anisotropy are disclosed. The multi-layer materials having defined engineered grain orientations in each layer of the multi-layer material and bond layers between adjacent layers orthogonal to the grain orientations. This configuration distributes applied stress across the plurality of layers in the multi-layer metal material and around a neutral axis of the multi-layer metal material and increases the overall mechanical properties of the disclosed multi-layer metal material relative to conventional wrought metal materials of the same or similar chemical constitution. The microstructure of each layer, group of layers, or across multiple layers may be tailored to the intended application of a device made from the material. Individual layers may be tuned for property variations, such as gradients, or to adjust the bond layer characteristics.

Abstract: An Inverted Cylindrical Magnetron (ICM) System and Methods of Use is disclosed herein generally comprising a co-axial central anode concentrically located within a first annular end anode and a second annular end anode; a process chamber including a top end and a bottom end in which the first annular end anode and the second annular end anode are coaxially disposed, whereby the first annular end anode, the second annular end anode, and the central anode form a 3-anode configuration to provide electric field uniformity, and the process chamber including a central annular space coupled to a tube insulator disposed about the central annular space wall; a cathode concentrically coupled to the tube insulator and a target; and a plurality of multi-zone electromagnets or hybrid electro-permanent magnets surrounding the exterior of the process chamber providing a tunable magnetic field.

Abstract: An intelligent skin based on a small-size distributed optical fiber sensing array. The intelligent skin includes an epidermis sensing array, an embedded optical fiber sensing array, a data collection system module, and a data processing mode recognition module. The body of the intelligent skin is made of a flexible material. The embedded optical fiber sensing array in an epidermis includes a plurality of all-fiber interferomatic sensing arrays. The data collection system module includes a broadband light source, an optical combiner/splitter, an optical path change-over switch, a signal detector and a computer. The data processing mode recognition module includes mode recognition and training of a neural network. The intelligent skin further includes an external display software used to perform intelligent sensing recognition for sense of touch, position, shape, and ingredient, temperature and vibration of an object and so on.

Abstract: An intelligent skin based on a small-size distributed optical fiber sensing array. The intelligent skin includes an epidermis sensing array, an embedded optical fiber sensing array, a data collection system module, and a data processing mode recognition module. The body of the intelligent skin is made of a flexible material. The embedded optical fiber sensing array in an epidermis includes a plurality of all-fiber interferomatic sensing arrays. The data collection system module includes a broadband light source, an optical combiner/splitter, an optical path change-over switch, a signal detector and a computer. The data processing mode recognition module includes mode recognition and training of a neural network. The intelligent skin further includes an external display software used to perform intelligent sensing recognition for sense of touch, position, shape, and ingredient, temperature and vibration of an object and so on.

Abstract: The present invention provides a method for realizing high stability of micro-nano optical fiber sagnac loop output by means of filter mode control, and belongs to the field of photoelectric detection technologies. In the present invention, the optical filter is combined with the micro-nano optical fiber Sagnac interference structure so as to control the Sagnac in-loop working mode by use of the mode selection characteristics of the filter. In this way, the interference mode is suppressed to better concentrate energy on the working mode, thereby improving the spectrum output uniformity and stability of the Sagnac loop. Further, the reflection and transmission modes of the optical filter do not participate in interference spectrum output and thus the performance of the system will not be affected. By designing and changing the parameters of the optical filter, the output characteristics of the interferometer can be dynamically controlled.

Abstract: The present invention provides a method for realizing high stability of micro-nano optical fiber sagnac loop output by means of filter mode control, and belongs to the field of photoelectric detection technologies. In the present invention, the optical filter is combined with the micro-nano optical fiber Sagnac interference structure so as to control the Sagnac in-loop working mode by use of the mode selection characteristics of the filter. In this way, the interference mode is suppressed to better concentrate energy on the working mode, thereby improving the spectrum output uniformity and stability of the Sagnac loop. Further, the reflection and transmission modes of the optical filter do not participate in interference spectrum output and thus the performance of the system will not be affected. By designing and changing the parameters of the optical filter, the output characteristics of the interferometer can be dynamically controlled.

Abstract: An intelligent optical fiber tactile sounding system and a method thereof, and belongs to the field of intelligent optical fiber sensing. The system includes a flexible optical fiber tactile sensing array, a photoelectric detection system, an intelligent pressure analysis software and an acoustic emission system; a small-scale distributed tactile sensing array is constructed by embedding a fiber-core mismatched optical fiber interferometric sensor into a flexible substrate material and performing sensing region division for an asymmetrical structure with an optical fiber structure as a delimiting line; a tactile sensor transmits tactile signals to the photoelectric detection system in the form of optical signals, the photoelectric detection system inputs these pressure signals into the intelligent pressure analysis software to determine a region and a size of a tactile source, and then sends an instruction to the acoustic emission system to enable the acoustic emission system to emit different sounds.

Abstract: Multi-layer metal or pseudometallic materials having engineered anisotropy are disclosed. The multi-layer materials having defined engineered grain orientations in each layer of the multi-layer material and bond layers between adjacent layers orthogonal to the grain orientations. This configuration distributes applied stress across the plurality of layers in the multi-layer metal material and around a neutral axis of the multi-layer metal material and increases the overall mechanical properties of the disclosed multi-layer metal material relative to conventional wrought metal materials of the same or similar chemical constitution. The microstructure of each layer, group of layers, or across multiple layers may be tailored to the intended application of a device made from the material. Individual layers may be tuned for property variations, such as gradients, or to adjust the bond layer characteristics.

Abstract: An intelligent optical fiber tactile sounding system and a method thereof, and belongs to the field of intelligent optical fiber sensing. The system includes a flexible optical fiber tactile sensing array, a photoelectric detection system, an intelligent pressure analysis software and an acoustic emission system; a small-scale distributed tactile sensing array is constructed by embedding a fiber-core mismatched optical fiber interferometric sensor into a flexible substrate material and performing sensing region division for an asymmetrical structure with an optical fiber structure as a delimiting line ; a tactile sensor transmits tactile signals to the photoelectric detection system in the form of optical signals, the photoelectric detection system inputs these pressure signals into the intelligent pressure analysis software to determine a region and a size of a tactile source, and then sends an instruction to the acoustic emission system to enable the acoustic emission system to emit different sounds.

Abstract: An Inverted Cylindrical Magnetron (ICM) System and Methods of Use is disclosed herein generally comprising a co-axial central anode concentrically located within a first annular end anode and a second annular end anode; a process chamber including a top end and a bottom end in which the first annular end anode and the second annular end anode are coaxially disposed, whereby the first annular end anode, the second annular end anode, and the central anode form a 3-anode configuration to provide electric field uniformity, and the process chamber including a central annular space coupled to a tube insulator disposed about the central annular space wall; a cathode concentrically coupled to the tube insulator and a target; and a plurality of multi-zone electromagnets or hybrid electro-permanent magnets surrounding the exterior of the process chamber providing a tunable magnetic field.

Abstract: An Inverted Cylindrical Magnetron (ICM) System and Methods of Use is disclosed herein generally comprising a co-axial central anode concentrically located within a first annular end anode and a second annular end anode; a process chamber including a top end and a bottom end in which the first annular end anode and the second annular end anode are coaxially disposed, whereby the first annular end anode, the second annular end anode, and the central anode form a 3-anode configuration to provide electric field uniformity, and the process chamber including a central annular space coupled to a tube insulator disposed about the central annular space wall; a cathode concentrically coupled to the tube insulator and a target; and a plurality of multi-zone electromagnets or hybrid electro-permanent magnets surrounding the exterior of the process chamber providing a tunable magnetic field.

Abstract: An Inverted Cylindrical Magnetron (ICM) System and Methods of Use is disclosed herein generally comprising a co-axial central anode concentrically located within a first annular end anode and a second annular end anode; a process chamber including a top end and a bottom end in which the first annular end anode and the second annular end anode are coaxially disposed, whereby the first annular end anode, the second annular end anode, and the central anode form a 3-anode configuration to provide electric field uniformity, and the process chamber including a central annular space coupled to a tube insulator disposed about the central annular space wall; a cathode concentrically coupled to the tube insulator and a target; and a plurality of multi-zone electromagnets or hybrid electro-permanent magnets surrounding the exterior of the process chamber providing a tunable magnetic field.

Abstract: An Inverted Cylindrical Magnetron (ICM) System and Methods of Use is disclosed herein generally comprising a co-axial central anode concentrically located within a first annular end anode and a second annular end anode; a process chamber including a top end and a bottom end in which the first annular end anode and the second annular end anode are coaxially disposed, whereby the first annular end anode, the second annular end anode, and the central anode form a 3-anode configuration to provide electric field uniformity, and the process chamber including a central annular space coupled to a tube insulator disposed about the central annular space wall; a cathode concentrically coupled to the tube insulator and a target; and a plurality of multi-zone electromagnets or hybrid electro-permanent magnets surrounding the exterior of the process chamber providing a tunable magnetic field.

Abstract: An Inverted Cylindrical Magnetron (ICM) System and Methods of Use is disclosed herein generally comprising a co-axial central anode concentrically located within a first annular end anode and a second annular end anode; a process chamber including a top end and a bottom end in which the first annular end anode and the second annular end anode are coaxially disposed, whereby the first annular end anode, the second annular end anode, and the central anode form a 3-anode configuration to provide electric field uniformity, and the process chamber including a central annular space coupled to a tube insulator disposed about the central annular space wall; a cathode concentrically coupled to the tube insulator and a target; and a plurality of multi-zone electromagnets or hybrid electro-permanent magnets surrounding the exterior of the process chamber providing a tunable magnetic field.

Abstract: An integrated in situ oxide etch process particularly useful for a counterbore dual-damascene structure over copper having in one inter-layer dielectric level a lower nitride stop layer, a lower oxide dielectric, a lower nitride stop layer, an upper oxide dielectric layer, and an anti-reflective coating (ARC). The process is divided into a counterbore etch and a trench etch with photolithography for each, and each step is preferably performed in a high-density plasma reactor having an inductively coupled plasma source primarily generating the plasma and a capacitively coupled pedestal supporting the wafer and producing the bias power. The counterbore etch preferably includes at least four substeps of opening the ARC, etching through the upper oxide and nitride layers, selectively etching the lower oxide layer but stopping on the lower nitride layer, and a post-etch treatment for removing residue.

Abstract: An integrated in situ oxide etch process particularly useful for a counterbore dual-damascene structure over copper having in one inter-layer dielectric level a lower nitride stop layer, a lower oxide dielectric, a lower nitride stop layer, an upper oxide dielectric layer, and an anti-reflective coating (ARC). The process is divided into a counterbore etch and a trench etch with photolithography for each, and each step is preferably performed in a high-density plasma reactor having an inductively coupled plasma source primarily generating the plasma and a capacitively coupled pedestal supporting the wafer and producing the bias power. The counterbore etch preferably includes at least four substeps of opening the ARC, etching through the upper oxide and nitride layers, selectively etching the lower oxide layer but stopping on the lower nitride layer, and a post-etch treatment for removing residue.