Patents by Inventor Tien-Chih Chang

Tien-Chih Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8564018
    Abstract: A structure for an integrated circuit is disclosed. The structure includes a crystalline substrate and four crystalline layers. The first crystalline layer of first lattice constant is positioned on the crystalline substrate. The second crystalline layer has a second lattice constant different from the first lattice constant, and is positioned on said first crystalline layer. The third crystalline layer has a third lattice constant different than said second lattice constant, and is positioned on said second crystalline layer. The strained fourth crystalline layer includes, at least partially, a MOSFET device.
    Type: Grant
    Filed: February 27, 2008
    Date of Patent: October 22, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun Chich Lin, Yee-Chia Yeo, Chien-Chao Huang, Chao-Hsiung Wang, Tien-Chih Chang, Chenming Hu, Fu-Liang Yang, Shih-Chang Chen, Mong-Song Liang, Liang-Gi Yao
  • Publication number: 20080142842
    Abstract: A structure for an integrated circuit is disclosed. The structure includes a crystalline substrate and four crystalline layers. The first crystalline layer of first lattice constant is positioned on the crystalline substrate. The second crystalline layer has a second lattice constant different from the first lattice constant, and is positioned on said first crystalline layer. The third crystalline layer has a third lattice constant different than said second lattice constant, and is positioned on said second crystalline layer. The strained fourth crystalline layer includes, at least partially, a MOSFET device.
    Type: Application
    Filed: February 27, 2008
    Publication date: June 19, 2008
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chun Chich LIN, Yee-Chia Yeo, Chien-Chao Huang, Chao-Hsiung Wang, Tien-Chih Chang, Chenming Hu, Fu-Liang Yang, Shih-Chang Chen, Mong-Song Liang, Liang-Gi Yao
  • Patent number: 7357838
    Abstract: A method of forming a strained silicon layer on a relaxed, low defect density semiconductor alloy layer such as SiGe is provided.
    Type: Grant
    Filed: March 8, 2005
    Date of Patent: April 15, 2008
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Chun Chieh Lin, Yee-Chia Yeo, Chien-Chao Huang, Chao-Hsiung Wang, Tien-Chih Chang, Chenming Hu, Fu-Liang Yang, Shih-Chang Chen, Mong-Song Liang, Liang-Gi Yao
  • Patent number: 7351994
    Abstract: At least one high-k device, and a method for forming the at least one high-k device, comprising the following. A structure having a strained substrate formed thereover. The strained substrate comprising at least an uppermost strained-Si epi layer. At least one dielectric gate oxide portion over the strained substrate. The at least one dielectric gate oxide portion having a dielectric constant of greater than about 4.0. A device over each of the at least one dielectric gate oxide portion to complete the least one high-k device. A method of forming the at least one high-k device.
    Type: Grant
    Filed: January 21, 2004
    Date of Patent: April 1, 2008
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Liang-Gi Yao, Tien-Chih Chang, Ming-Fang Wang, Shih-Chang Chen, Mong-Song Liang
  • Patent number: 7105393
    Abstract: A strained silicon layer fabrication employs a substrate having successively formed thereover: (1) a first silicon-germanium alloy material layer; (2) a first silicon layer; (3) a second silicon-germanium alloy material layer; and (4) a second silicon layer. Within the fabrication each of the first silicon-germanium alloy layer and the second silicon-germanium alloy layer is formed of a thickness less than a threshold thickness for dislocation defect formation, such as to provide attenuated dislocation defect formation within the strained silicon layer fabrication.
    Type: Grant
    Filed: January 30, 2004
    Date of Patent: September 12, 2006
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Liang-Gi Yao, Tien-Chih Chang, CC Lin, Shin-Chang Chen, Mong-Song Liang
  • Patent number: 7012009
    Abstract: A method for making an improved silicon-germanium layer on a substrate for the base of a heterojunction bipolar transistor is achieved using a two-temperature process. The method involves growing a seed layer at a higher temperature to reduce the grain size with shorter reaction times, and then growing an epitaxial Si—Ge layer with a Si cap layer at a lower temperature to form the intrinsic base with low boron out-diffusion. This results in an HBT having the desired narrow base profile while minimizing the discontinuities (voids) in the Si—Ge layer over the insulator to provide good electrical contacts and uniformity to the intrinsic base.
    Type: Grant
    Filed: February 24, 2004
    Date of Patent: March 14, 2006
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Kuen-Chyr Lee, Liang-Gi Yao, Tien-Chih Chang, Chia-Lin Chen, Shih-Chang Chen, Mong-Song Liang
  • Publication number: 20050186750
    Abstract: A method for making an improved silicon-germanium layer on a substrate for the base of a heterojunction bipolar transistor is achieved using a two-temperature process. The method involves growing a seed layer at a higher temperature to reduce the grain size with shorter reaction times, and then growing an epitaxial Si—Ge layer with a Si pap layer at a lower temperature to form the intrinsic base with low boron out-diffusion. This results in an HBT having the desired narrow base profile while minimizing the discontinuities (voids) in the Si—Ge layer over the insulator to provide good electrical contacts and uniformity to the intrinsic base.
    Type: Application
    Filed: February 24, 2004
    Publication date: August 25, 2005
    Inventors: Kuen-Chyr Lee, Liang-Gi Yao, Tien-Chih Chang, Chia-Lin Chen, Shih-Chang Chen, Mong-Song Liang
  • Publication number: 20050170577
    Abstract: A strained silicon layer fabrication employs a substrate having successively formed thereover: (1) a first silicon-germanium alloy material layer; (2) a first silicon layer; (3) a second silicon-germanium alloy material layer; and (4) a second silicon layer. Within the fabrication each of the first silicon-germanium alloy layer and the second silicon-germanium alloy layer is formed of a thickness less than a threshold thickness for dislocation defect formation, such as to provide attenuated dislocation defect formation within the strained silicon layer fabrication.
    Type: Application
    Filed: January 30, 2004
    Publication date: August 4, 2005
    Inventors: Liang-Gi Yao, Tien-Chih Chang, CC Lin, Shin-Chang Chen, Mong-Song Liang
  • Publication number: 20050158971
    Abstract: A method of forming a strained silicon layer on a relaxed, low defect density semiconductor alloy layer such as SiGe is provided.
    Type: Application
    Filed: March 8, 2005
    Publication date: July 21, 2005
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun Chich Lin, Yee-Chia Yeo, Chien-Chao Huang, Chao-Hsiung Wang, Tien-Chih Chang, Chenming Hu, Fu-Liang Yang, Shih-Chang Chen, Mong-Song Liang, Liang-Gi Yao
  • Publication number: 20050156255
    Abstract: At least one high-k device, and a method for forming the at least one high-k device, comprising the following. A structure having a strained substrate formed thereover. The strained substrate comprising at least an uppermost strained-Si epi layer. At least one dielectric gate oxide portion over the strained substrate. The at least one dielectric gate oxide portion having a dielectric constant of greater than about 4.0. A device over each of the at least one dielectric gate oxide portion to complete the least one high-k device. A method of forming the at least one high-k device.
    Type: Application
    Filed: January 21, 2004
    Publication date: July 21, 2005
    Inventors: Liang-Gi Yao, Tien-Chih Chang, Ming-Fang Wang, Shih-Chang Chen, Mong-Song Liang
  • Patent number: 6878610
    Abstract: A method of forming a strained silicon layer on a relaxed, low defect density semiconductor alloy layer such as SiGe, has been developed. In a first embodiment of this invention the relaxed, low density SiGe layer is epitaxially grown on an silicon layer which in turn is located on an underlying SiGe layer. During the epitaxial growth of the overlying SiGe layer defects are formed in the underlying silicon layer resulting in the desired, relaxation, and decreased defect density for the SiGe layer. A second embodiment features an anneal procedure performed during growth of the relaxed SiGe layer, resulting in additional relaxation and decreased defect density, while a third embodiment features an anneal procedure performed to the underlying silicon layer prior to epitaxial growth of the relaxed SiGe layer, again allowing optimized relaxation and defect density to be realized for the SiGe layer.
    Type: Grant
    Filed: August 27, 2002
    Date of Patent: April 12, 2005
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun Chich Lin, Yee-Chia Yeo, Chien-Chao Huang, Chao-Hsiung Wang, Tien-Chih Chang, Chenming Hu, Fu-Liang Yang, Shih-Chang Chen, Mong-Song Liang, Liang-Gi Yao