Patents by Inventor Tien-I Bo

Tien-I Bo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Capacitance probe for surface dielectric constant measurements
    Patent number: 6856146
    Abstract: A fringing capacitance measurement probe and a method for determining a surface dielectric constant. The fringing capacitance measurement probe includes a planarized surface probe element for making interfacial planar contact with a measurement surface, the planarized surface having a metal conductive line portion and an insulating area portion to form a measuring area. The perimeter portion of the metal conductive line portion has a length greater than the perimeter length of the measuring area such that a fringing capacitance of the measurement surface may be determined.
    Type: Grant
    Filed: November 7, 2002
    Date of Patent: February 15, 2005
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventor: Tien-I Bo
  • Capacitance probe for suface dielectric constant measurements
    Publication number: 20040100288
    Abstract: A fringing capacitance measurement probe and a method for determining a surface dielectric constant. The fringing capacitance measurement probe includes a planarized surface probe element for making interfacial planar contact with a measurement surface, the planarized surface having a metal conductive line portion and an insulating area portion to form a measuring area. The perimeter portion of the metal conductive line portion has a length greater than the perimeter length of the measuring area such that a fringing capacitance of the measurement surface may be determined.
    Type: Application
    Filed: November 7, 2002
    Publication date: May 27, 2004
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventor: Tien-I Bo