Patents by Inventor Tien-Pei CHOU
Tien-Pei CHOU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20250081730Abstract: A display may include an array of pixels such as light-emitting diode pixels. The pixels may include multiple circuitry decks that each include one or more circuit components such as transistors, capacitors, and/or resistors. The circuitry decks may be vertically stacked. Each circuitry deck may include a planarization layer formed from a siloxane material that conforms to underlying components and provides a planar upper surface. In this way, circuitry components may be vertically stacked to mitigate the size of each pixel footprint. The circuitry components may include capacitors that include both a high-k dielectric layer and a low-k dielectric layer. The display pixel may include a via with a width of less than 1 micron.Type: ApplicationFiled: June 26, 2024Publication date: March 6, 2025Inventors: Andrew Lin, Alper Ozgurluk, Chao Liang Chien, Cheuk Chi Lo, Chia-Yu Chen, Chien-Chung Wang, Chih Pang Chang, Chih-Hung Yu, Chih-Wei Chang, Chin Wei Hsu, ChinWei Hu, Chun-Kai Tzeng, Chun-Ming Tang, Chun-Yao Huang, Hung-Che Ting, Jung Yen Huang, Lungpao Hsin, Shih Chang Chang, Tien-Pei Chou, Wen Sheng Lo, Yu-Wen Liu, Yung Da Lai
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Patent number: 12191199Abstract: The present disclosure describes a method to a metallization process with improved gap fill properties. The method includes forming a contact opening in an oxide, forming a barrier layer in the contact opening, forming a liner layer on the barrier layer, and forming a first metal layer on the liner layer to partially fill the contact opening. The method further includes forming a second metal layer on the first metal layer to fill the contact opening, where forming the second metal layer includes sputter depositing the second metal layer with a first radio frequency (RF) power and a direct current power, as well as reflowing the second metal layer with a second RF power.Type: GrantFiled: March 29, 2021Date of Patent: January 7, 2025Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Tien-Pei Chou, Ken-Yu Chang, Sheng-Hsuan Lin, Yueh-Ching Pai, Yu-Ting Lin
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Publication number: 20240395611Abstract: The present disclosure describes a method to a metallization process with improved gap fill properties. The method includes forming a contact opening in a dielectric layer to expose a source/drain epitaxial layer in a substrate. An aspect ratio of the contact opening is between about 3 and about 10. The method further includes forming a first metal layer in the contact opening and in contact with the source/drain epitaxial layer, forming a barrier layer on the first metal layer, forming a liner layer on the barrier layer, forming second metal layer on the liner layer to partially fill the contact opening, and forming a third metal layer on the second metal layer to fill the contact opening.Type: ApplicationFiled: July 30, 2024Publication date: November 28, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Tien-Pei CHOU, Ken-Yu CHANG, Sheng-Hsuan LIN, Yueh-Ching PAI, Yu-Ting LIN
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Publication number: 20240023382Abstract: An organic light-emitting diode (OLED) display may have an array of organic light-emitting diode pixels that each have OLED layers interposed between a cathode and an anode. Voltage may be applied to the anode of each pixel to control the magnitude of emitted light. The conductivity of the OLED layers may allow leakage current to pass between neighboring anodes in the display. To reduce leakage current and the accompanying cross-talk in a display, a cutting structure may disrupt continuity of the OLED layers. The cutting structure may have two undercuts to disrupt continuity of at least some of the OLED layers. The cutting structure may include a conductive portion that provides a cathode voltage to a cathode layer for the OLED pixels.Type: ApplicationFiled: September 28, 2023Publication date: January 18, 2024Inventors: Siddharth Harikrishna Mohan, Gwanwoo Park, Ping Kuen Daniel Tsang, Pei Yin, Weixin Li, Li-An Liu, Alexandru Riposan, Teruo Sasagawa, Steven J Brewer, Younggu Lee, Mitsuhiro Kashiwabara, Rui Liu, Hung-Yi Tsai, Tien-Pei Chou, Yi Wen Wang, Mahendra Chhabra, Chieh Hung Yang, Bhadrinarayana Lalgudi Visweswaran, David K. Schoenwald
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Publication number: 20210280462Abstract: The present disclosure describes a method to a metallization process with improved gap fill properties. The method includes forming a contact opening in an oxide, forming a barrier layer in the contact opening, forming a liner layer on the barrier layer, and forming a first metal layer on the liner layer to partially fill the contact opening. The method further includes forming a second metal layer on the first metal layer to fill the contact opening, where forming the second metal layer includes sputter depositing the second metal layer with a first radio frequency (RF) power and a direct current power, as well as reflowing the second metal layer with a second RF power.Type: ApplicationFiled: March 29, 2021Publication date: September 9, 2021Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Tien-Pei CHOU, Ken-Yu CHANG, Sheng-Hsuan LIN, Yueh-Ching PAI, Yu-Ting LIN
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Patent number: 10964590Abstract: The present disclosure describes a method to a metallization process with improved gap fill properties. The method includes forming a contact opening in an oxide, forming a barrier layer in the contact opening, forming a liner layer on the barrier layer, and forming a first metal layer on the liner layer to partially fill the contact opening. The method further includes forming a second metal layer on the first metal layer to fill the contact opening, where forming the second metal layer includes sputter depositing the second metal layer with a first radio frequency (RF) power and a direct current power, as well as reflowing the second metal layer with a second RF power.Type: GrantFiled: April 30, 2018Date of Patent: March 30, 2021Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Tien-Pei Chou, Ken-Yu Chang, Sheng-Hsuan Lin, Yueh-Ching Pai, Yu-Ting Lin
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Publication number: 20200210759Abstract: A computerized method identifies an input and kernel similarity in binarized neural network (BNN) across different applications as they are being processed by processors such as a GPU. The input and kernel similarity in BNN across different applications are analyzed to reduce computation redundancy to accelerate BNN inference. A computer-executable instructions stored thereon an on-chip arrangement receives a first data value for a data source for processing by the BNN at an inference phase. The computer-executable instructions further receives a second data value for the data source for processing by the BNN at the inference phase. The first data value is processed bitwise operations. A difference between the first data value and the second data value is calculated. The difference is stored in the on-chip arrangement. The computer-executable instructions applies the bitwise operations to the stored difference.Type: ApplicationFiled: December 31, 2018Publication date: July 2, 2020Applicant: Nanjing Iluvatar CoreX Technology Co., Ltd. (DBA "Iluvatar CoreX Inc. Nanjing")Inventors: Tien-Pei Chou, Po-Wei Chou, Ching-En Lee, Cheng Fu
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Patent number: 10332789Abstract: The present disclosure relates generally to techniques for forming a continuous adhesion layer for a contact plug. A method includes forming an opening through a dielectric layer to an active area on a substrate. The method includes performing a first plasma treatment along a sidewall of the opening. The method includes performing an atomic layer deposition (ALD) process to form a metal nitride layer along the sidewall of the opening. The ALD process includes a plurality of cycles. Each cycle includes flowing a precursor to form a metal monolayer along the sidewall and performing a second plasma treatment to treat the metal monolayer with nitrogen. The method includes depositing a conductive material on the metal nitride layer in the opening to form a conductive feature.Type: GrantFiled: February 2, 2018Date of Patent: June 25, 2019Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Tien-Pei Chou, Ken-Yu Chang, Chun-Chieh Wang, Yueh-Ching Pai, Yu-Ting Lin, Yu-Wen Cheng
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Publication number: 20190164822Abstract: The present disclosure relates generally to techniques for forming a continuous adhesion layer for a contact plug. A method includes forming an opening through a dielectric layer to an active area on a substrate. The method includes performing a first plasma treatment along a sidewall of the opening. The method includes performing an atomic layer deposition (ALD) process to form a metal nitride layer along the sidewall of the opening. The ALD process includes a plurality of cycles. Each cycle includes flowing a precursor to form a metal monolayer along the sidewall and performing a second plasma treatment to treat the metal monolayer with nitrogen. The method includes depositing a conductive material on the metal nitride layer in the opening to form a conductive feature.Type: ApplicationFiled: February 2, 2018Publication date: May 30, 2019Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Tien-Pei CHOU, Ken-Yu CHANG, Chun-Chieh WANG, Yueh-Ching PAI, Yu-Ting LIN, Yu-Wen CHENG
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Publication number: 20190148223Abstract: The present disclosure describes a method to a metallization process with improved gap fill properties. The method includes forming a contact opening in an oxide, forming a barrier layer in the contact opening, forming a liner layer on the barrier layer, and forming a first metal layer on the liner layer to partially fill the contact opening. The method further includes forming a second metal layer on the first metal layer to fill the contact opening, where forming the second metal layer includes sputter depositing the second metal layer with a first radio frequency (RF) power and a direct current power, as well as reflowing the second metal layer with a second RF power.Type: ApplicationFiled: April 30, 2018Publication date: May 16, 2019Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Tien-Pei CHOU, Ken-Yu CHANG, Sheng-Hsuan LIN, Yueh-Ching PAI, Yu-Ting LIN