Patents by Inventor Tiezhong Ma
Tiezhong Ma has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10670467Abstract: A device for measuring surface-temperature of a turbine blade, the device including a probe having a front-end mirror for receiving infrared radiation of a surface on the blade, a collimation lens for refracted the infrared radiation, a PD detector to receive the infrared radiation, and a focal-length servo; and a radial-scanning servo connected to the probe. The front-end mirror, the collimation lens, and PD detector are disposed along the optical axis of the collimation lens. The focal-length servo is adapted to move the collimation lens along the optical axis of the collimation lens. The radial-scanning servo is adapted to move the probe along the optical axis of the collimation lens. The device of the invention is capable of accurately targeting a particular point on the blade having an irregular shape for temperature measurement to accurately detect the temperature distribution on the surface of the blade.Type: GrantFiled: January 9, 2018Date of Patent: June 2, 2020Assignee: UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINAInventors: Chao Wang, Jun Hu, Fei Wang, Zezhan Zhang, Jing Jiang, Jie Xiong, Yueming Wang, Tiezhong Ma, Dong Yan, Xueke Gou, Ting Zhou, Yi Niu, Pei Huang
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Publication number: 20180195907Abstract: A device for measuring surface-temperature of a turbine blade, the device including a probe having a front-end mirror for receiving infrared radiation of a surface on the blade, a collimation lens for refracted the infrared radiation, a PD detector to receive the infrared radiation, and a focal-length servo; and a radial-scanning servo connected to the probe. The front-end mirror, the collimation lens, and PD detector are disposed along the optical axis of the collimation lens. The focal-length servo is adapted to move the collimation lens along the optical axis of the collimation lens. The radial-scanning servo is adapted to move the probe along the optical axis of the collimation lens. The device of the invention is capable of accurately targeting a particular point on the blade having an irregular shape for temperature measurement to accurately detect the temperature distribution on the surface of the blade.Type: ApplicationFiled: January 9, 2018Publication date: July 12, 2018Inventors: Chao WANG, Jun HU, Fei WANG, Zezhan ZHANG, Jing JIANG, Jie XIONG, Yueming WANG, Tiezhong MA, Dong YAN, Xueke GOU, Ting ZHOU, Yi NIU, Pei HUANG
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Patent number: 9176048Abstract: A kind of normal incidence broadband spectroscopic polarimeter which is easy to adjust the focus, has no chromatic aberration, maintains the polarization and has simple structure. The normal incidence broadband spectroscopic polarimeter can make the probe beam normal incidence and focus on the sample surface by using at least one flat reflector element to change propagation direction of the focused beam. Moreover, the normal incidence broadband spectroscopic polarimeter contains at least one polarizer as to measure the anisotropy or non-uniform samples, such as three-dimensional profile and material optical constants of thin films consisting of the periodic structure. An optical measurement system including the normal incidence broadband spectroscopic polarimeter is also provided.Type: GrantFiled: June 1, 2011Date of Patent: November 3, 2015Assignee: BEIOPTICS TECHNOLOGY CO., LTDInventors: Guoguang Li, Tao Liu, Edgar Genio, Tiezhong Ma, Xiaolang Yan
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Patent number: 9170156Abstract: Disclosed is a normal-incidence broadband spectroscopic polarimeter containing reference beam, comprising a light source, a first reflecting unit, a first concentrating unit, a second concentrating unit, a polarizer, a first curved mirror, a first planar mirror, a second reflecting unit and a probing unit. Also disclosed is an optical measurement system, comprising the normal-incidence broadband spectroscopic polarimeter containing reference beam. The normal-incidence broadband spectroscopic polarimeter containing reference beam achieves an integral combination of the light beams after splitting, can maintain the polarization state of the light beams while increasing the light transmission efficiency, and has a low complexity.Type: GrantFiled: September 6, 2012Date of Patent: October 27, 2015Assignee: Bei Optics Technology Co., Ltd.Inventors: Guoguang Li, Tao Liu, Jiangyan Zhao, Qingyang Guo, Edgar Genio, Tiezhong Ma, Yang Xia
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Publication number: 20140354991Abstract: Disclosed is a normal-incidence broadband spectroscopic polarimeter containing reference beam, comprising a light source, a first reflecting unit, a first concentrating unit, a second concentrating unit, a polarizer, a first curved mirror, a first planar mirror, a second reflecting unit and a probing unit. Also disclosed is an optical measurement system, comprising the normal-incidence broadband spectroscopic polarimeter containing reference beam. The normal-incidence broadband spectroscopic polarimeter containing reference beam achieves an integral combination of the light beams after splitting, can maintain the polarization state of the light beams while increasing the light transmission efficiency, and has a low complexity.Type: ApplicationFiled: September 6, 2012Publication date: December 4, 2014Applicant: BEI OPTICS TECHNOLOGY CO., LTD.Inventors: Guoguang Li, Tao Liu, Jiangyan Zhao, Qingyang Guo, Edgar Genio, Tiezhong Ma, Yang Xia
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Patent number: 8767209Abstract: An oblique incidence broadband spectroscopic polarimeter which is easy to adjust the focus, achromatic, maintains the polarization and has simple structure is provided. It comprise at least one polarizer (P, A), at least one curved reflector element (OAP1, OAP2, OAP3, OAP4) and at least two flat reflector elements (M1, M2). By utilizing the flat reflector element, the oblique incidence broadband spectroscopic polarimeter can change the propagate direction of beam, and compensate the polarization changes caused by the reflective focusing unit, make the polarization of beam passed the polarizer unchanged when obliquely incident and focus on the sample surface. The oblique incidence broadband spectroscopic polarimeter can accurately measure the optical constants of sample material, film thickness, and/or the critical dimension (CD) properties or three-dimensional profile for analyze the periodic structure of the sample.Type: GrantFiled: May 30, 2011Date of Patent: July 1, 2014Assignee: Beioptics Technology Co., Ltd.Inventors: Guoguang Li, Tao Liu, Edgar Genio, Tiezhong Ma, Yan Xiaolang
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Publication number: 20130070234Abstract: An oblique incidence broadband spectroscopic polarimeter which is easy to adjust the focus, achromatic, maintains the polarization and has simple structure is provided. It comprise at least one polarizer (P, A), at least one curved reflector element (OAP1, OAP2, OAP3, OAP4) and at least two flat reflector elements (M1, M2). By utilizing the flat reflector element, the oblique incidence broadband spectroscopic polarimeter can change the propagate direction of beam, and compensate the polarization changes caused by the reflective focusing unit, make the polarization of beam passed the polarizer unchanged when obliquely incident and focus on the sample surface. The oblique incidence broadband spectroscopic polarimeter can accurately measure the optical constants of sample material, film thickness, and/or the critical dimension (CD) properties or three-dimensional profile for analyze the periodic structure of the sample.Type: ApplicationFiled: May 30, 2011Publication date: March 21, 2013Applicant: BEIOPTICS TECHNOLOGY CO., LTD.Inventors: Guoguang Li, Tao Liu, Edgar Genio, Tiezhong Ma, Yan Xiaolang
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Publication number: 20130050702Abstract: A kind of normal incidence broadband spectroscopic polarimeter which is easy to adjust the focus, has no chromatic aberration, maintains the polarization and has simple structure. The normal incidence broadband spectroscopic polarimeter can make the probe beam normal incidence and focus on the sample surface by using at least one flat reflector element to change propagation direction of the focused beam. Moreover, the normal incidence broadband spectroscopic polarimeter contains at least one polarizer as to measure the anisotropy or non-uniform samples, such as three-dimensional profile and material optical constants of thin films consisting of the periodic structure. An optical measurement system including the normal incidence broadband spectroscopic polarimeter is also provided.Type: ApplicationFiled: June 1, 2011Publication date: February 28, 2013Applicant: BEIOPTICS TECHNOLOGY CO., LTDInventors: Guoguang Li, Tao Liu, Edgar Genio, Tiezhong Ma, Xiaolang Yan
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Patent number: 6683011Abstract: A process for forming a hafnium oxide-containing film on a substrate such as silicon that includes introducing an anhydrous hafnium nitrate-containing precursor into a reactor containing the substrate, and converting the precursor into the hafnium oxide-containing film on the substrate by chemical vapor deposition.Type: GrantFiled: November 14, 2001Date of Patent: January 27, 2004Assignee: Regents of the University of MinnesotaInventors: Ryan C. Smith, Tiezhong Ma, Stephen A. Campbell, Wayne L. Gladfelter
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Publication number: 20030092287Abstract: A process for forming a hafnium oxide-containing film on a substrate such as silicon that includes introducing an anhydrous hafnium nitrate-containing precursor into a reactor containing the substrate, and converting the precursor into the hafnium oxide-containing film on the substrate by chemical vapor deposition.Type: ApplicationFiled: November 14, 2001Publication date: May 15, 2003Inventors: Ryan C. Smith, Tiezhong Ma, Stephen A. Campbell, Wayne L. Gladfelter