Patents by Inventor Tiina McKee

Tiina McKee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SYNTHESIS AND USE OF PRECURSORS FOR ALD OF MOLYBDENUM OR TUNGSTEN CONTAINING THIN FILMS
    Publication number: 20230227977
    Abstract: Processes for forming Mo and W containing thin films, such as MoS2, WS2, MoSe2, and WSe2 thin films are provided. Methods are also provided for synthesizing Mo or W beta-diketonate precursors. Additionally, methods are provided for forming 2D materials containing Mo or W.
    Type: Application
    Filed: March 7, 2023
    Publication date: July 20, 2023
    Inventors: Tiina McKee, Timo Hatanpää, Mikko Ritala, Markku Leskela
  • Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin films
    Patent number: 11624112
    Abstract: Processes for forming Mo and W containing thin films, such as MoS2, WS2, MoSe2, and WSe2 thin films are provided. Methods are also provided for synthesizing Mo or W beta-diketonate precursors. Additionally, methods are provided for forming 2D materials containing Mo or W.
    Type: Grant
    Filed: May 18, 2021
    Date of Patent: April 11, 2023
    Assignee: ASM IP HOLDING B.V.
    Inventors: Tiina McKee, Timo Hatanpää, Mikko Ritala, Markku Leskela
  • SYNTHESIS AND USE OF PRECURSORS FOR ALD OF MOLYBDENUM OR TUNGSTEN CONTAINING THIN FILMS
    Publication number: 20210269915
    Abstract: Processes for forming Mo and W containing thin films, such as MoS2, WS2, MoSe2, and WSe2 thin films are provided. Methods are also provided for synthesizing Mo or W beta-diketonate precursors. Additionally, methods are provided for forming 2D materials containing Mo or W.
    Type: Application
    Filed: May 18, 2021
    Publication date: September 2, 2021
    Inventors: Tiina McKee, Timo Hatanpää, Mikko Ritala, Markku Leskela
  • Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin films
    Patent number: 11047042
    Abstract: Processes for forming Mo and W containing thin films, such as MoS2, WS2, MoSe2, and WSe2 thin films are provided. Methods are also provided for synthesizing Mo or W beta-diketonate precursors. Additionally, methods are provided for forming 2D materials containing Mo or W.
    Type: Grant
    Filed: May 24, 2016
    Date of Patent: June 29, 2021
    Assignee: ASM IP HOLDING B.V.
    Inventors: Tiina McKee, Timo Hatanpää, Mikko Ritala, Markku Leskelä