Patents by Inventor Tiina Nyrkio-Maklin

Tiina Nyrkio-Maklin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Calibration system for the calibration of mass flow controllers
    Patent number: 4671097
    Abstract: A calibration system for the calibration of mass flow controllers of an apparatus used for a chemical vapor phase growth, comprising at least one mass flow meter for measuring the characteristics of the mass flow controllers and a computer for calculating correction coefficients for the different controllers. The system preferably comprises at least one flow meter for measuring at least the adjoining ranges of the mass flow controllers covering adjacent flow ranges.
    Type: Grant
    Filed: February 14, 1986
    Date of Patent: June 9, 1987
    Assignee: Oy Nokia AB
    Inventors: Jouko Kurki, Orjan Sandvik, Tiina Nyrkio-Maklin