Patents by Inventor Tiina Sarnet

Tiina Sarnet has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SYNTHESIS AND USE OF PRECURSORS FOR ALD OF MOLYBDENUM OR TUNGSTEN CONTAINING THIN FILMS
    Publication number: 20180127873
    Abstract: Processes for forming Mo and W containing thin films, such as MoS2, WS2, MoSe2, and WSe2 thin films are provided. Methods are also provided for synthesizing Mo or W beta-diketonate precursors. Additionally, methods are provided for forming 2D materials containing Mo or W.
    Type: Application
    Filed: May 24, 2016
    Publication date: May 10, 2018
    Inventors: Tiina Sarnet, Timo Hatanpää, Mikko Ritala, Markku Leskelä