Patents by Inventor Tilmann Ritter

Tilmann Ritter has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Disposal device for pollutants
    Patent number: 7722826
    Abstract: The invention relates to inlet elements at disposal devices for process exhaust gases containing pollutants, as are produced in particular in semiconductor component fabrication. The solution is intended to make it possible to avoid deposits in the inlet region for process exhaust gases at disposal devices. To achieve this object, the inlet elements according to the invention are designed in such a way that a porous, gas-permeable wall element, via which an inert gas can be fed into the interior of the inlet element routing process exhaust gas, is present at the inlet element.
    Type: Grant
    Filed: September 10, 2004
    Date of Patent: May 25, 2010
    Assignee: Das-Dunnschicht Anlagen Systeme GmbH
    Inventors: Wido Wiesenberg, Ralph Wiesenberg, Tilmann Ritter, Andreas Frenzel
  • Inlet element at a disposal device for pollutants
    Publication number: 20050074372
    Abstract: The invention relates to inlet elements at disposal devices for process exhaust gases containing pollutants, as are produced in particular in semiconductor component fabrication. The solution is intended to make it possible to avoid deposits in the inlet region for process exhaust gases at disposal devices. To achieve this object, the inlet elements according to the invention are designed in such a way that a porous, gas-permeable wall element, via which an inert gas can be fed into the interior of the inlet element routing process exhaust gas, is present at the inlet element.
    Type: Application
    Filed: September 10, 2004
    Publication date: April 7, 2005
    Applicant: DAS - Dunnschicht Anlagen Systeme GmbH
    Inventors: Wido Wiesenberg, Ralph Wiesenberg, Tilmann Ritter, Andreas Frenzel