Abstract: A method is described for process control during a drilling process, a laser drilling process in particular. While a laser beam is affecting an area of a workpiece, the measuring beam is directed onto the borehole being drilled within this area. As soon as a breakthrough has been produced in the borehole, the measuring beam is able to pass through the borehole and to be detected by a sensor. This measuring beam is detected by a sensor. It can thus be accurately determined whether and when a breakthrough occurred.

Abstract: A device and a method for optimizing laser drilling and laser erosion. An electrode is situated opposite a workpiece to be processed. A current-voltage source is interconnected in such a way that an electric field is applied between the workpiece and the electrode, the workpiece being positively charged and the electrode being negatively charged. By acting upon a point of action on the workpiece, a laser beam causes the material erosion. Metal ions and/or plasma ions created in the proximity of the point of action are positively charged. They are accelerated in the direction of the electrode, so that they are removed from the point of action.