Patents by Inventor Tilmann Schwertner

Tilmann Schwertner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20070252959
    Abstract: The invention relates to a device for adjusting the temperature of elements, especially adjusting the temperature of a projection lens (1) or of parts of a projection lens (1) for use in semiconductor lithography. Said device comprises a temperature-adjusting jacket (18) which is provided with at least one temperature-adjusting line (19). Said at least one temperature-adjusting line (19) is formed into the temperature-adjusting jacket (18).
    Type: Application
    Filed: September 24, 2005
    Publication date: November 1, 2007
    Inventors: Tilmann Schwertner, Ulrich Bingel, Klaus Zimmer
  • Publication number: 20060158707
    Abstract: A mount for an optical element has a fitting area for fitting the optical element. Located in the fitting area is an additional material whose state can be changed by means of a state changing device in such a way that following change of state of the additional material the optical element is held in the mount in a form-fitting and releasable fashion by the additional material. Furthermore, provided is a method for manipulating an optical device which comprises providing an optical element attached to an optical device by an adhesive, said adhesive comprising particles susceptible to a magnetic field. In a second step a magnetic field is applied to the adhesive. Also provided is an optical device to be used in conjunction with this method.
    Type: Application
    Filed: December 27, 2005
    Publication date: July 20, 2006
    Inventors: Tilmann Schwertner, Hans-Joachim Weippert, Uwe Hamm