Patents by Inventor Tilo Rotth

Tilo Rotth has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Metal Deposition with Reduced Stress
    Publication number: 20150235855
    Abstract: Various techniques, methods and devices are disclosed where metal is deposited on a substrate, and stress caused by the metal to the substrate is limited, for example to limit a bending of the wafer.
    Type: Application
    Filed: April 30, 2015
    Publication date: August 20, 2015
    Inventors: Manfred Schneegans, Juergen Foerster, Bernhard Weidgans, Norbert Urbansky, Tilo Rotth
  • Metal Deposition with Reduced Stress
    Publication number: 20140117509
    Abstract: Various techniques, methods and devices are disclosed where metal is deposited on a substrate, and stress caused by the metal to the substrate is limited, for example to limit a bending of the wafer.
    Type: Application
    Filed: October 26, 2012
    Publication date: May 1, 2014
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Manfred Schneegans, Juergen Foerster, Bernhard Weidgans, Norbert Urbansky, Tilo Rotth