Abstract: In a method for coating a substrate in a vacuum chamber having a rotating magnetron, wherein a substrate is guided past the magnetron in a substrate transport direction and is coated by a material, which has been isolated from a target connected to the magnetron, and, optionally with the material reacting with a reactive gas present in the vacuum chamber, homogeneity of the coating layer on a substrate is improved by stabilizing the working point by way of the target rotation. This is achieved in that a periodic change of a first process parameter caused by the target revolution is compensated for by a periodic change of a second process parameter having a determined level and/or by employing two magnetrons having different rotational speeds.

Abstract: In a method for coating a substrate in a vacuum chamber having a rotating magnetron, wherein a substrate is guided past the magnetron in a substrate transport direction and is coated by a material, which has been isolated from a target connected to the magnetron, and, optionally with the material reacting with a reactive gas present in the vacuum chamber, homogeneity of the coating layer on a substrate is improved by stabilizing the working point by way of the target rotation. This is achieved in that a periodic change of a first process parameter caused by the target revolution is compensated for by a periodic change of a second process parameter having a determined level and/or by employing two magnetrons having different rotational speeds.

Abstract: The invention relates to a quick-action clamping holder for electronic or optoelectronic devices, particularly optoelectronic sensors, the housing of which has a external profile. The quick-action clamping holder has a body to be fitted at a holding location and at least one fixing arm, which can be pivoted from an open position into a closed position. In the closed position a device to be held is held with respect to the body by a back-gripping clamping engagement of the fixing arm with the external profile of the device. An actuating means is also provided for the manual actuation of the fixing arm. Furthermore, there is a spring means for pressing the fixing arm into the closed position or open position and that a locking means is provided for locking the fixing arm in the position where the latter is not forced or pressed by the spring means.