Patents by Inventor Tim Casper

Tim Casper has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Remote plasma cleaning method for processing chambers
    Patent number: 6274058
    Abstract: A processing chamber cleaning method is described which utilizes microwave energy to remotely generate a reactive species to be used alone or in combination with an inert gas to remove deposits from a processing chamber. The reactive species can remove deposits from a first processing region at a first pressure and then remove deposits from a second processing region at a second pressure. Also described is a cleaning process utilizing remotely generated reactive species in a single processing region at two different pressures. Additionally, different ratios of reactive gas and inert gas may be utilized to improve the uniformity of the cleaning process, increase the cleaning rate, reduce recombination of reactive species and increase the residence time of reactive species provided to the processing chamber.
    Type: Grant
    Filed: July 2, 1999
    Date of Patent: August 14, 2001
    Assignee: Applied Materials, Inc.
    Inventors: Ravi Rajagopalan, Patricia M. Liu, Pravin K. Narwankar, Huyen Tran, Padmanabhan Krishnaraj, Alan Ablao, Tim Casper