Patents by Inventor Tim Pinkerton

Tim Pinkerton has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Manufacturable chromeless alternating phase shift mask structure with phase grating
    Patent number: 7160651
    Abstract: A chromeless APSM structure may be used to enable the pitch of features on the mask to be decreased by removing the chrome line between features, and thus remove the limit based on the size of the chrome line. The chromeless APSM may include primary features surrounded by a boundary region including sub resolution features. A relatively high precision lithography tool may be used in a first lithography step to print the features in the chromeless APSM structure. The boundary region may allow for a less precise lithography tool to be used in a second lithography step.
    Type: Grant
    Filed: October 17, 2003
    Date of Patent: January 9, 2007
    Assignee: Intel Corporation
    Inventors: Tim Pinkerton, Wen-Hao Cheng
  • Manufacturable chromeless alternating phase shift mask structure with phase grating
    Publication number: 20050084769
    Abstract: A chromeless APSM structure may be used to enable the pitch of features on the mask to be decreased by removing the chrome line between features, and thus remove the limit based on the size of the chrome line. The chromeless APSM may include primary features surrounded by a boundary region including sub resolution features. A relatively high precision lithography tool may be used in a first lithography step to print the features in the chromeless APSM structure. The boundary region may allow for a less precise lithography tool to be used in a second lithography step.
    Type: Application
    Filed: October 17, 2003
    Publication date: April 21, 2005
    Inventors: Tim Pinkerton, Wen-Hao Cheng