Patents by Inventor Timo Bergman

Timo Bergman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gas distribution apparatus for improved film uniformity in an epitaxial system
    Patent number: 10501866
    Abstract: A gas distribution system is disclosed in order to obtain better film uniformity on a wafer. The better film uniformity may be achieved by utilizing an expansion plenum and a plurality of, for example, proportioning valves to ensure an equalized pressure or flow along each gas line disposed above the wafer.
    Type: Grant
    Filed: January 19, 2017
    Date of Patent: December 10, 2019
    Assignee: ASM IP Holding B.V.
    Inventors: Stephen Dale Coomer, Robert Vyne, Timo Bergman, Lee Bode, Wentao Wang
  • GAS DISTRIBUTION APPARATUS FOR IMPROVED FILM UNIFORMITY IN AN EPITAXIAL SYSTEM
    Publication number: 20170260649
    Abstract: A gas distribution system is disclosed in order to obtain better film uniformity on a wafer. The better film uniformity may be achieved by utilizing an expansion plenum and a plurality of, for example, proportioning valves to ensure an equalized pressure or flow along each gas line disposed above the wafer.
    Type: Application
    Filed: January 19, 2017
    Publication date: September 14, 2017
    Inventors: Stephen Dale Coomer, Robert Vyne, Timo Bergman, Lee Bode, Wentao Wang