Patents by Inventor Timo Luchs

Timo Luchs has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device and method for processing a microstructured component
    Patent number: 11487211
    Abstract: The invention relates to a device and a method for processing a microstructured component, in particular for microlithography. A device for processing a microstructured component comprises an ion beam source for applying an ion beam to at least regions of the component, wherein an ion energy of this ion beam is no more than 5 keV, and a detector for detecting particles backscattered at the component.
    Type: Grant
    Filed: December 9, 2020
    Date of Patent: November 1, 2022
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Nicole Auth, Timo Luchs, Joachim Welte
  • DEVICE AND METHOD FOR PROCESSING A MICROSTRUCTURED COMPONENT
    Publication number: 20210173310
    Abstract: The invention relates to a device and a method for processing a microstructured component, in particular for microlithography. A device for processing a microstructured component comprises an ion beam source for applying an ion beam to at least regions of the component, wherein an ion energy of this ion beam is no more than 5 keV, and a detector for detecting particles backscattered at the component.
    Type: Application
    Filed: December 9, 2020
    Publication date: June 10, 2021
    Inventors: Nicole Auth, Timo Luchs, Joachim Welte