Abstract: This disclosure provides systems, methods and apparatus for providing compact shutter assemblies. Shutter assemblies can be formed in a more compact fashion, allowing for higher pixel-per-inch displays, by incorporating shutters that during actuation pass over or under portions of the actuators that control those shutters.

Abstract: This disclosure provides systems, methods and apparatus including processes that use two layers of resist, with a layer of etch stop material in between.

Abstract: In one innovative aspect of the disclosure, a method includes patterning a first region and a first portion of a second region of a substrate using a first reticle. The method also includes patterning the second region and a first portion of the first region using a second reticle. The method additionally includes forming a first array of first patterned elements based on the patterning by the first reticle, and forming a second array of second patterned elements based on the patterning by the second reticle. In some implementations, each of the first and the second arrays are incomplete in each of the first portions. However, the first patterned elements in the first portion of the second region are complementary to the second patterned elements in the first portion of the second region. Similarly, the first patterned elements in the first portion of the first region are complementary to the second patterned elements in the first portion of the first region.

Abstract: Systems, methods and methods of manufacture for, among other things, a MEMS display that has a substrate with a first and a second array of apertures. The first and second arrays are, typically, formed on the substrate so that the arrays are adjacent and define a field boundary line that may extend between the two arrays and along a width of the substrate. In at least one array, the apertures that are proximate the field boundary line are placed at locations on the substrate to reduce differences in luminance between one portion of the display and another portion of the display.

Abstract: This disclosure provides systems, methods and apparatus including microelectromechanical system microphones. In one aspect, the systems include a substrate made of a low dielectric material, such as glass. A layer of semiconductor material extends, substantially continuously over a surface of the substrate and includes an array of display elements that modulate light to form an image and a movable diaphragm that detects acoustic signals. The diaphragm is held away from the substrate by springs that include beams having an aspect ratio of about four to one.

Abstract: A display apparatus includes a plurality of electromechanical systems (EMS) devices disposed on a first surface defined by a face of a substrate. Each EMS device includes a component which is movable in a plane that is substantially parallel to the first surface. The apparatus also includes a second surface positioned proximate to the substrate such that the plurality of EMS devices are located between the first surface and the second surface. In addition, each EMS device includes at least one anti-stiction projection positioned between the movable component and the second surface.

Abstract: This disclosure provides systems, methods and apparatus for modulating light to form an image on a display, as well as methods manufacturing such apparatus. The display apparatus includes dual-level shutter assemblies. Each dual-level shutter assembly includes front and rear light obstructing levels positioned adjacent to respective front and rear light blocking layers. The front and rear light blocking layers define apertures providing optical paths from a backlight to the front of the display. The dual-level shutters selectively obstruct these optical paths to generate an image.

Abstract: This disclosure provides systems, methods and apparatus for modulating light to form an image on a display, as well as methods manufacturing such apparatus. The display apparatus includes shutters having asymmetric light obstructing portions extending out from opposing sides of a shutter aperture along an axis of motion of the shutter. Actuators move the shutters laterally along the axis of motion to move the shutter between fully closed, partially open, and fully open states to modulate light, thereby forming an image.

Abstract: This disclosure provides systems, methods and apparatus for generating images using dual-shutter shutter assemblies. Such shutter assemblies include two shutters that move over a common aperture to selectively obstruct the passage of light there through. In the closed position, portions of one of the shutters overlaps a portion of the other shutter to provide such light obstruction without the two shutters needing to come into contact.

Abstract: This disclosure provides systems, methods, and apparatus for providing pixel circuits for controlling the state of operation of light modulators in a display. A pixel circuit used to control one or more display elements of a MEMS display apparatus can include a first output node coupled to a first actuator of a display element and a second output node coupled to a second actuator of the display element. The first output node can be coupled to an actuation interconnect via a first pre-charge switch connected in parallel with a first capacitor. The second output node can be connected to the actuation interconnect via a second pre-charge switch connected in parallel with a second capacitor. Energizing the first output node or the second output node can cause the display element to enter or remain in a first state or a second state, respectively.

Abstract: This disclosure provides systems, methods and apparatus for modulating light to form an image on a display, as well as methods manufacturing such apparatus. The display apparatus includes dual-level shutter assemblies. Each dual-level shutter assembly includes front and rear light obstructing levels positioned adjacent to respective front and rear light blocking layers. The front and rear light blocking layers define apertures providing optical paths from a backlight to the front of the display. The dual-level shutters selectively obstruct these optical paths to generate an image.

Abstract: This disclosure provides systems, methods and apparatus for displaying images. Some such apparatus include an array of display elements coupled to a substrate and an elevated aperture layer (EAL) suspended over the array of display elements. The EAL is coupled to the substrate, and includes, for each of the display elements, at least one aperture for allowing passage of light therethrough. Methods for manufacturing such apparatus include at least one of forming etch holes through the EAL, employing an at least partially sublimatable sacrificial mold, employing a two phase release process, and releasing the apparatus such that a portion of a sacrificial mold remains surrounding portions of the apparatus.

Abstract: This disclosure provides systems, methods and apparatus for displaying images. One such apparatus includes a substrate, an elevated aperture layer (EAL) defining a plurality of apertures formed therethrough, a plurality of anchors for supporting the EAL over the substrate and a plurality of display elements positioned between the substrate and the EAL. Each of the display elements may correspond to at least one respective aperture of the plurality of apertures defined by the EAL. Each display element also includes a movable portion supported over the substrate by a corresponding anchor supporting the EAL over the substrate. In some implementations, one or more light dispersion elements may be disposed in optical paths passing through the apertures defined by the EAL.

Abstract: This disclosure provides systems, methods and apparatus for displaying images. Some such apparatus include a transparent substrate, a display element formed on the substrate, a light blocking elevated aperture layer (EAL) supported over the substrate by an anchor formed on the substrate, and an electrical interconnect disposed on the EAL for carrying an electrical signal to the display element. The electrical interconnect can include one or more of a data voltage interconnect, a scan-line interconnect or a global interconnect. In some implementations, a dielectric layer can separate the electrical interconnect from the EAL. The EAL can include an aperture formed through it that corresponds to the display element. In some implementations, a second electrical interconnect disposed on the substrate can be electrically coupled to a plurality of display elements.

Abstract: This disclosure provides systems, methods and apparatus for generating images using dual-shutter shutter assemblies. Such shutter assemblies include two shutters that move over a common aperture to selectively obstruct the passage of light there through. In the closed position, portions of one of the shutters overlaps a portion of the other shutter to provide such light obstruction without the two shutters needing to come into contact.

Abstract: This disclosure provides systems, methods and apparatus for modulating light to form an image on a display, as well as methods manufacturing such apparatus. The display apparatus includes shutters having asymmetric light obstructing portions extending out from opposing sides of a shutter aperture along an axis of motion of the shutter. Actuators move the shutters laterally along the axis of motion to move the shutter between fully closed, partially open, and fully open states to modulate light, thereby forming an image.

Abstract: A display apparatus includes a plurality of electromechanical systems (EMS) devices disposed on a first surface defined by a face of a substrate. Each EMS device includes a component which is movable in a plane that is substantially parallel to the first surface. The apparatus also includes a second surface positioned proximate to the substrate such that the plurality of EMS devices are located between the first surface and the second surface. In addition, each EMS device includes at least one anti-stiction projection positioned between the movable component and the second surface.

Abstract: Rather than increasing the mass of the structure, the structure in a sensor system suspends its substrate from some mechanical ground. Motion of the substrate relative to the mechanical ground thus provides the movement information. To those ends, the sensor system includes a base, a substrate, and a flexible member suspended from at least a portion of the substrate. At least a portion of the flexible member is capable of moving relative to at least a portion of the substrate. In addition, the flexible member is secured to the base, thus causing the substrate to be movable relative to the base. Moreover, the mass of the substrate is greater than the mass of the flexible member. The substrate and flexible member are configured to interact to produce a motion signal identifying movement of the base.

Abstract: A method of forming a microphone having a variable capacitance first deposits high temperature deposition material on a die. The high temperature material ultimately forms structure that contributes to the variable capacitance. The method then forms circuitry on the die after depositing the deposition material. The circuitry is configured to detect the variable capacitance.

Abstract: Display devices incorporating shutter-based light modulators are disclosed along with methods of manufacturing such devices. The methods are compatible with thin-film manufacturing processes known in the art and result in displays having lower power-consumption.