Patents by Inventor Timothy C. Kinsey

Timothy C. Kinsey has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Slurry distribution system that continuously circulates slurry through a distribution loop
    Patent number: 5957759
    Abstract: A slurry distribution system for distributing slurry to a polishing machine that polishes a semiconductor wafer is disclosed. The slurry distribution system includes a storage tank for storing the slurry, a mixing device for mixing the slurry in the storage tank, a distribution loop with an inlet and outlet in fluid communication with the storage tank, a valve in fluid communication with the distribution loop for dispensing the slurry to the polishing machine, and a pump for circulating the slurry from the storage tank through the distribution loop and into the storage tank regardless of whether the slurry is dispensed to the polishing machine. In this manner, the slurry is agitated and efficiently used during polishing and during intervals between polishing.
    Type: Grant
    Filed: April 17, 1997
    Date of Patent: September 28, 1999
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Jon Cardenas, Alexander P. Plevich, Timothy C. Kinsey