Abstract: Disclosed are methods and apparatus for measuring a characteristics of a through-silicon via (TSV) structure. A beam profile reflectivity (BPR) tool is used to move to a first xy position having a TSV structure. The BPR tool is then used to obtain an optimum focus of at the first xy position by adjusting the z position to a first optimum z position for obtaining measurements at the first xy position. Via the BPR tool, reflectivity measurements for a plurality of angles of incidence are obtained at the first xy position. One or more film thicknesses for the TSV structure are determined based on the reflectivity measurements. A z position can also be recorded and used to determine a height of such TSV structure, as well as one or more adjacent xy positions.

Abstract: Photoreflectance spectroscopy is used to measure strain at or near the edge of a wafer in a production process. The strain measurement is used to anticipate defects and make prospective corrections in later stages of the production process. Strain measurements are used to associate various production steps with defects to enhance later production processes.

Abstract: Photoreflectance spectroscopy is used to measure strain at or near the edge of a wafer in a production process. The strain measurement is used to anticipate defects and make prospective corrections in later stages of the production process. Strain measurements are used to associate various production steps with defects to enhance later production processes.

Abstract: Fluid filter devices include at least one porous body. In one example, the fluid filter device can be incorporated as part of a fluid filter apparatus. The fluid filter apparatus can include a container defining an interior area wherein the filter device is positioned within the interior area. Particulate can be positioned within the interior area to cover the porous body to enhance the filter capabilities of the fluid filter apparatus.

Abstract: Amphibious vehicle has at least one system which is actuated or has its mode of operation changed when the vehicle changes from land mode to water mode or vice versa. The vehicle comprises sensor means which produce an output signal which varies in relation to the proportion of the mass of the vehicle which is buoyantly supported by a body of water. The sensors may sense the position of a wheel relative to the body of the vehicle. This may be achieved by checking the position of a suspension member. The sensor means may comprise a linear sensor or a rotary sensor. The sensor may comprise a potentiometer. Control means may average the output of the sensor over time. Where several sensors are used, control means may process output signals from each sensor to provide an overall output signal. A water presence sensor, such as a thermistor, may be used to provide a second control signal.