Abstract: A dual-mode electron beam lithography machine (10) comprises an electron beam column (11) for generating an electron beam (12) for writing a pattern on a surface of a substrate 14) by way of a writing current, the substrate being supported on a stage (13) movable to displace the substrate relative to the beam. The column (10) includes beam deflecting plates (16) for deflecting the beam to scan the substrate surface in accordance with the pattern to be written and beam blanking plates (15) for blanking the beam to interrupt writing. The machine further comprises control means (17 to 20) for changing each of writing current, stage movement, beam deflection and beam blanking between a predetermined first mode optimised for pattern-writing accuracy, thus resolution, and a predetermined second mode different from the first mode and optimised for pattern-writing speed, thus throughput.

Abstract: A combined cutting blade and heat bar for use with a vacuum packaging device having a lid for sealing over the cavity of a base is disclosed. The cutting blade and heat bar are connected to one another and movable via a single actuating mechanism mounted to the lid. In use, in one step the combined mechanism is lowered with the heat bar unheated and the cutting element cuts slits in the bag for evacuation of the air. After air evacuation, the combined mechanism is lowered with the heat bar heated, melting the bag closed behind the slitted area of the bag.

Abstract: A dual-mode electron beam lithography machine (10) comprises an electron beam column (11) for generating an electron beam (12) for writing a pattern on a surface of a substrate 14) by way of a writing current, the substrate being supported on a stage (13) movable to displace the substrate relative to the beam. The column (10) includes beam deflecting plates (16) for deflecting the beam to scan the substrate surface in accordance with the pattern to be written and beam blanking plates (15) for blanking the beam to interrupt writing. The machine further comprises control means (17 to 20) for changing each of writing current, stage movement, beam deflection and beam blanking between a predetermined first mode optimised for pattern-writing accuracy, thus resolution, and a predetermined second mode different from the first mode and optimised for pattern-writing speed, thus throughput.

Abstract: Pattern-writing equipment for writing a pattern on the surface of an substrate (S) by electron beam lithography comprises electron beam generating means, such as an electron source (10) and anode (12), focusing means (13, 14, 16, 19, 20) for focusing the beam to produce a writing spot on the substrate surface, and a beam deflector for displacing the writing spot on the substrate surface to trace the pattern to be written. Also present in the equipment are control means for varying the writing spot size to produce a simultaneous increase or simultaneous decrease in both spot size and writing current. The focusing means is distinguished by two lens sets each containing a high focal strength main lens (13 or 14) and a low focal strength auxiliary lens (19 or 20). The control means varies the writing spot size by causing a reciprocal change in the focal strengths of the two auxiliary lens (19, 20) while writing is being carried out.

Abstract: A combined cutting blade and heat bar for use with a vacuum packaging device having a lid for sealing over the cavity of a base is disclosed. The cutting blade and heat bar are connected to one another and movable via a single actuating mechanism mounted to the lid. In use, in one step the combined mechanism is lowered with the heat bar unheated and the cutting element cuts slits in the bag for evacuation of the air. After air evacuation, the combined mechanism is lowered with the heat bar heated, melting the bag closed behind the slitted area of the bag.

Abstract: A vacuum packaging machine having a chamber comprised of an injection-molded lid and an injection-molded basin.

Abstract: The present invention is a seal bar for use in connection with a vacuum packaging machine, the seal bar being actuated by an air bladder and moved over floating guide shafts. The guide shafts provide the primary electrical connection to the seal bar, thereby eliminating the need for a direct electrical connection to the seal bar.

Abstract: A combined cutting blade and heat bar for use with a vacuum packaging device having a lid for sealing over the cavity of a base is disclosed. The cutting blade and heat bar are connected to one another and movable via a single actuating mechanism mounted to the lid. In use, in one step the combined mechanism is lowered with the heat bar unheated and the cutting element cuts slits in the bag for evacuation of the air. After air evacuation, the combined mechanism is lowered with the heat bar heated, melting the bag closed behind the slitted area of the bag.