Patents by Inventor Timothy H. Dalton

Timothy H. Dalton has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD TO DECREASE FLUORINE CONTAMINATION IN LOW DIELECTRIC CONSTATNT FILMS
    Publication number: 20030116533
    Abstract: A method for maintaining critical dimension during the etching of dielectrics, having the following steps:
    Type: Application
    Filed: December 20, 2001
    Publication date: June 26, 2003
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Timothy H. Dalton, Bernd E. E. Kastenmeier, Theodorus E. Standaert