Patents by Inventor Timothy L. Herman

Timothy L. Herman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for abatement of gaseous pollutants
    Patent number: 6511641
    Abstract: An apparatus and method are provided for treating pollutants in a gaseous stream. The apparatus comprises tubular inlets for mixing a gas stream with other oxidative and inert gases for mixture within a reaction chamber. The reaction chamber is heated by heating elements and has orifices through which cool or heated air enters into the central reaction chamber. A process is also provided whereby additional gases are added to the gaseous stream preferably within the temperature range of 650 C-950 C which minimizes or alleviates the production of NOx.
    Type: Grant
    Filed: June 27, 2001
    Date of Patent: January 28, 2003
    Assignee: Advanced Technology Materials, Inc.
    Inventors: Timothy L. Herman, Jack Ellis, Floris Y. Tsang, Daniel O. Clark, Belynda G. Flippo, David Inori, Keith Kaarup, Mark Morgenlaender, Aaron Mao
  • Advanced apparatus and method for abatement of gaseous pollutants
    Publication number: 20010055555
    Abstract: An apparatus and method are provided for treating pollutants in a gaseous stream. The apparatus comprises tubular inlets for mixing a gas stream with other oxidative and inert gases for mixture within a reaction chamber. The reaction chamber is heated by heating elements and has orifices through which cool or heated air enters into the central reaction chamber. A process is also provided whereby additional gases are added to the gaseous stream preferably within the temperature range of 650 C.-950 C. which minimizes or alleviates the production of NOx.
    Type: Application
    Filed: June 27, 2001
    Publication date: December 27, 2001
    Applicant: Advanced Technology Materials, Inc.
    Inventors: Timothy L. Herman, Jack Ellis, Floris Y. Tsang, Daniel O. Clark, Belynda G. Flippo, David Inori, Keith Kaarup, Mark Morgenlaender, Aaron Mao
  • Advanced apparatus for abatement of gaseous pollutants
    Patent number: 6261524
    Abstract: An apparatus and method are provided for treating pollutants in a gaseous stream. The apparatus comprises tubular inlets for mixing a gas stream with other oxidative and inert gases for mixture within a reaction chamber. The reaction chamber is heated by heating elements and has orifices through which cool or heated air enters into the central reaction chamber. A process is also provided whereby additional gases are added to the gaseous stream preferably within the temperature range of 650 C.-950° C. which minimizes or alleviates the production of NOx.
    Type: Grant
    Filed: April 20, 1999
    Date of Patent: July 17, 2001
    Assignee: Advanced Technology Materials, Inc.
    Inventors: Timothy L. Herman, Jack Ellis, Floris Y. Tsang, Daniel O. Clark, Belynda Flippo, David Inori, Keith Kaarup, Mark Morgenlaender, Aaron Mao
  • Chamber cleaning mechanism
    Patent number: 6182325
    Abstract: An apparatus for cleaning a chamber is disclosed. Scraping blades are rotatably mounted within a chamber and parallel to a longitudinal axis of the chamber. The scraping blades are rotated circumferentially within the chamber, scraping the inner surface of the chamber to prevent the buildup of particulate matter. An annular gear assembly provides mounting support for the scraping blades. A pneumatically operated pushrod assembly rotates the scraping blades circumferentially within the chamber. The annular gear assembly and pushrod assembly do not obstruct a direct path through the chamber.
    Type: Grant
    Filed: March 10, 1998
    Date of Patent: February 6, 2001
    Assignee: Advanced Technology Materials, Inc.
    Inventor: Timothy L. Herman